Two-Dimensional MEMS Stage Integrated With Microlens Arrays for Laser Beam Steering

被引：14
|
作者：
Gokce, Sertan Kutal [1 ]
Holmstrom, Sven [1 ]
Hibert, Cyrille [2 ]
Olcer, Selim [1 ]
Bowman, David [3 ]
Urey, Hakan [1 ]
机构：
[1] Koc Univ, Opt Microsyst Lab, Dept Elect Engn, TR-34450 Istanbul, Turkey
[2] Ecole Polytech Fed Lausanne, Ctr Micronanotechnol, CH-1015 Lausanne, Switzerland
[3] Microvision Inc, Redmond, WA 98052 USA
来源：
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2011年 / 20卷 / 01期
关键词：
Beam steering; comb drive; endoscopic imaging; microelectromechanical systems (MEMS) stage; microlens array (MLA); MICROSCANNER; SCANNER; SYSTEM;
D O I：
10.1109/JMEMS.2010.2090507
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A novel microelectromechanical stage with one uniaxial set of combs capable of 2-D actuation is presented. A polymer microlens array (MLA) is mounted vertically onto the stage. Driven at resonance, the stage deflects 124 mu m out of plane and 34 mu m in plane. Finally, laser beam steering is demonstrated using two cascaded MLAs.
引用
收藏
页码：15 / 17
页数：3
相关论文
共 50 条
  • [1] MEMS Stage Integrated with Microlens Arrays for High-Resolution Beam Steering
    Gokce, Sertan Kutal
    Holmstrom, Sven
    Hibert, Cyrille
    Ataman, Caglar
    Arslan, Aslihan
    Seren, Huseyin R.
    Urey, Hakan
    [J]. PROCEEDINGS OF THE EUROSENSORS XXIII CONFERENCE, 2009, 1 (01): : 1319 - +
  • [2] Electronic Two-Dimensional Beam Steering for Integrated Optical Phased Arrays
    Abiri, Behrooz
    Aflatouni, Firooz
    Rekhi, Angad
    Hajimiri, Ali
    [J]. 2014 OPTICAL FIBER COMMUNICATIONS CONFERENCE AND EXHIBITION (OFC), 2014,
  • [3] Femtosecond laser fabrication of apertures on two-dimensional microlens arrays
    Langer, G.
    Brodoceanu, D.
    Baeuerle, D.
    [J]. APPLIED PHYSICS LETTERS, 2006, 89 (26)
  • [4] Machine learning assisted two-dimensional beam-steering for integrated optical phased arrays
    Sved, Joel
    Song, Shijie
    Chen, Yeming
    Zhou, Luping
    Minasian, Robert
    Yi, Xiaoke
    [J]. OPTICS COMMUNICATIONS, 2023, 540
  • [5] Two-dimensional Beam Steering in Coherently Coupled Vertical Cavity Surface Emitting Laser Arrays
    Xu Kun
    Wang Hai-li
    Wang Xian-li
    Du Yin-xiao
    Xun Meng
    [J]. ACTA PHOTONICA SINICA, 2019, 48 (01)
  • [6] Design and Optimization of Two-Dimensional Nano-Arrays for Beam Steering
    Altinoklu, Askin
    Rasoolzadeh, N.
    Ergul, Ozgur
    [J]. 2018 INTERNATIONAL APPLIED COMPUTATIONAL ELECTROMAGNETICS SOCIETY SYMPOSIUM (ACES), 2018,
  • [7] SIN integrated optical phased arrays for two-dimensional beam steering at a single near-infrared wavelength
    Tyler, Nicola A.
    Fowler, Daivid
    Malhouitre, Stephane
    Garcia, Stephanie
    Grosse, Philippe
    Rabaud, Wilfried
    Szelag, Bertrand
    [J]. OPTICS EXPRESS, 2019, 27 (04): : 5851 - 5858
  • [8] Practical two-dimensional beam steering system using an integrated tunable laser and an optical phased array
    Ma, Weichao
    Tan, Su
    Wang, Kuankuan
    Guo, Weihua
    Liu, Ye
    Liao, Lianggang
    Zhou, Lianggang
    Zhou, Jun
    Li, Xin
    Liang, Lei
    Li, Wangzhe
    [J]. APPLIED OPTICS, 2020, 59 (32) : 9985 - 9994
  • [9] Design of two-dimensional piezoelectric laser scanner system for precision laser beam steering
    Luo, Dong
    Xiong, Xiaogang
    Chen, Wei
    Huang, Ruining
    [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 2023, 94 (10):
  • [10] ANALYSIS OF BEAM-STEERING WITH DECENTERED MICROLENS ARRAYS
    WATSON, EA
    [J]. OPTICAL ENGINEERING, 1993, 32 (11) : 2665 - 2670
12345