Materials selection for thin films for radio frequency microelectromechanical systems

被引：6
|
作者：
Guisbiers, G. [1 ]
Van Overschelde, O. [1 ]
Wautelet, M. [1 ]
机构：
[1] Univ Mons, B-7000 Mons, Belgium
来源：
MATERIALS & DESIGN | 2007年 / 28卷 / 06期
关键词：
D O I：
10.1016/j.matdes.2006.04.006
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Materials selection is an important subject in microtechnology. The methodology developed by Ashby is used here. It is shown that it can be applied easily to microelectromechanical systems (MEMS). Firstly, a. selection concerning a minimization of intrinsic residual stresses for thin films deposited by evaporation process is presented. Secondly, the selection of materials to serve in the design of the bridge of a MEMS-RF switch and a MEMS-RF varicap (variable capacitor) is considered. (C) 2006 Elsevier Ltd. All rights reserved.
引用
收藏
页码：1994 / 1997
页数：4
相关论文
共 50 条
  • [31] NbN thin films for superconducting radio frequency cavities
    Roach, W. M.
    Skuza, J. R.
    Beringer, D. B.
    Li, Z.
    Clavero, C.
    Lukaszew, R. A.
    SUPERCONDUCTOR SCIENCE & TECHNOLOGY, 2012, 25 (12):
  • [32] Characterization of packaged inline-type radio frequency microelectromechanical systems power sensors
    Zhang, Zhiqiang
    Liao, Xiaoping
    SENSORS AND ACTUATORS A-PHYSICAL, 2013, 201 : 294 - 301
  • [33] Electrodeposition and characterization of magnetostrictive galfenol (FeGa) thin films for use in microelectromechanical systems
    Estrine, Eliot C.
    Robbins, William P.
    Maqableh, Mazin M.
    Stadler, Bethanie J. H.
    JOURNAL OF APPLIED PHYSICS, 2013, 113 (17)
  • [34] Cantilever type radio frequency microelectromechanical systems shunt capacitive switch design and fabrication
    Demirel, Kaan
    Yazgan, Erdem
    Demir, Simsek
    Akin, Tayfun
    JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, 2015, 14 (03):
  • [35] Thermotractive titanium-nickel thin films for microelectromechanical systems and active composites
    Grummon, DS
    Pence, TJ
    MATERIALS FOR SMART SYSTEMS II, 1997, 459 : 331 - 343
  • [36] Viscoelasticity Recovery Mechanism in Radio Frequency Microelectromechanical Switches
    Barbato, Marco
    Cester, Andrea
    Meneghesso, Gaudenzio
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 2016, 63 (09) : 3620 - 3626
  • [37] Microelectromechanical system radio frequency switches in a picosatellite mission
    Yao, JJ
    Chien, C
    Mihailovich, R
    Panov, V
    DeNatale, J
    Studer, J
    Li, XB
    Wang, AH
    Park, S
    SMART MATERIALS & STRUCTURES, 2001, 10 (06): : 1196 - 1203
  • [38] Microwave modelling of radio frequency microelectromechanical rotary switches
    Pranonsatit, S.
    Holmes, A. S.
    Lucyszyn, S.
    IET MICROWAVES ANTENNAS & PROPAGATION, 2011, 5 (03) : 255 - 261
  • [39] Materials issues in microelectromechanical systems (MEMS)
    Spearing, SM
    ACTA MATERIALIA, 2000, 48 (01) : 179 - 196
  • [40] Phononic frequency combs in microelectromechanical systems
    Seshia, Ashwin
    INTERNATIONAL ULTRASONICS SYMPOSIUM (IEEE IUS 2021), 2021,
12345