Materials selection for thin films for radio frequency microelectromechanical systems

被引：6
|
作者：
Guisbiers, G. [1 ]
Van Overschelde, O. [1 ]
Wautelet, M. [1 ]
机构：
[1] Univ Mons, B-7000 Mons, Belgium
来源：
MATERIALS & DESIGN | 2007年 / 28卷 / 06期
关键词：
D O I：
10.1016/j.matdes.2006.04.006
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Materials selection is an important subject in microtechnology. The methodology developed by Ashby is used here. It is shown that it can be applied easily to microelectromechanical systems (MEMS). Firstly, a. selection concerning a minimization of intrinsic residual stresses for thin films deposited by evaporation process is presented. Secondly, the selection of materials to serve in the design of the bridge of a MEMS-RF switch and a MEMS-RF varicap (variable capacitor) is considered. (C) 2006 Elsevier Ltd. All rights reserved.
引用
收藏
页码：1994 / 1997
页数：4
相关论文
共 50 条
  • [1] Radio Frequency Microelectromechanical Systems in Defence and Aerospace
    Sastry, D. V. K.
    DEFENCE SCIENCE JOURNAL, 2009, 59 (06) : 568 - 579
  • [2] Review of radio frequency microelectromechanical systems technology
    Lucyszyn, S
    IEE PROCEEDINGS-SCIENCE MEASUREMENT AND TECHNOLOGY, 2004, 151 (02) : 93 - 103
  • [3] Microelectromechanical systems based on ferroelectric thin films
    Polta, DL
    MICROELECTRONIC ENGINEERING, 1995, 29 (1-4) : 51 - 58
  • [4] Application of PZT thin films in microelectromechanical systems
    Polla, DL
    SMART ELECTRONICS AND MEMS - SMART STRUCTURES AND MATERIALS 1997, 1997, 3046 : 24 - 27
  • [5] Ferroelectric thin films in microelectromechanical systems applications
    Polla, DL
    Francis, LF
    MRS BULLETIN, 1996, 21 (07) : 59 - 65
  • [6] Novel narrowband radio frequency microelectromechanical systems filters
    Liu, Wenli
    Chen, Zeji
    Kan, Xiao
    Wang, Tianyun
    Jia, Qianqian
    Zhu, Yinfang
    Zhao, Jicong
    Yuan, Quan
    Yang, Jinling
    Yang, Fuhua
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2021, 31 (02)
  • [7] Barium-strontium-titanate thin films for application in radio-frequency-microelectromechanical capacitive switches
    Kirchoefer, SW
    Cukauskas, EJ
    Barker, NS
    Newman, HS
    Chang, W
    APPLIED PHYSICS LETTERS, 2002, 80 (07) : 1255 - 1257
  • [8] Piezoelectric aluminum nitride thin films for microelectromechanical systems
    Piazza, Gianluca
    Felmetsger, Valeriy
    Muralt, Paul
    Olsson, Roy H., III
    Ruby, Richard
    MRS BULLETIN, 2012, 37 (11) : 1051 - 1061
  • [9] Meshless Analysis of Radio Frequency Microelectromechanical Systems Shunt Switch
    Kanthamani, S.
    Mohan, S. Vijay
    Raju, S.
    Abhaikumar, V.
    Mohan, V.
    DEFENCE SCIENCE JOURNAL, 2009, 59 (06) : 622 - 626
  • [10] Processing of PZT piezoelectric thin films for microelectromechanical systems
    Hendrickson, M
    Su, T
    TrolierMcKinstry, S
    Rod, BJ
    Zeto, RJ
    ISAF '96 - PROCEEDINGS OF THE TENTH IEEE INTERNATIONAL SYMPOSIUM ON APPLICATIONS OF FERROELECTRICS, VOLS 1 AND 2, 1996, : 683 - 686
12345