A ZnO nanorod based 64° YX LiNbO3 surface acoustic wave CO sensor

被引：0
|
作者：
Sadek, A. Z. [1 ]
Wlodarski, W. [1 ]
Kalantar-Zadeh, K. [1 ]
Li, Y. [2 ]
Yu, W. [2 ]
Li, X. [2 ]
Yu, X. [2 ]
机构：
[1] RMIT Univ, Sch Elect & Comp Engn, Sensor Technol Lab, Melbourne, Vic, Australia
[2] Chinese Acad Sci, Shanghai Inst Ceram, Shanghai, Peoples R China
来源：
2006 IEEE SENSORS, VOLS 1-3 | 2006年
关键词：
D O I：
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中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
Zinc oxide (ZnO) nanorod based surface acoustic wave (SAW) gas sensor has been developed. ZnO nanorods were deposited onto a layered ZnO/64 degrees YX LiNbO3 substrate using a liquid solution method. Micro-characterization results reveal that the diameter and area density of ZnO nanorods are around 100 nm and 107 cm(-2), respectively. The sensor was exposed to different concentrations of CO in synthetic air. The sensor response at operating temperatures between 200 degrees C and 300 degrees C was examined. The study showed that the sensor responded with highest frequency shift at 265 degrees C. At this temperature, stable base-line and fast response and recovery were observed. The developed sensor is promising for industrial applications.
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页码：706 / +
页数：2
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