Direct characterization of ZnO films in composite resonators by the resonance spectrum method

被引：0
|
作者：
Zhang, Y [1 ]
Wang, Z [1 ]
Cheeke, JDN [1 ]
Hickernell, FS [1 ]
机构：
[1] Concordia Univ, Dept Phys, Montreal, PQ H3G 1M8, Canada
来源：
1999 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1 AND 2 | 1999年
关键词：
D O I：
暂无
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
A direct method to characterize a piezoelectric film has been developed. Based on the measured resonance spectrum of a composite resonator, the electromechanical coupling coefficient k(t)(2), density and elastic constant C-33(D) Of the piezoelectric film can be derived. Good agreement with experiment was obtained.
引用
收藏
页码：991 / 994
页数：4
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