Direct characterization of ZnO films in composite resonators by the resonance spectrum method

被引：0
|
作者：
Zhang, Y [1 ]
Wang, Z [1 ]
Cheeke, JDN [1 ]
Hickernell, FS [1 ]
机构：
[1] Concordia Univ, Dept Phys, Montreal, PQ H3G 1M8, Canada
来源：
1999 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1 AND 2 | 1999年
关键词：
D O I：
暂无
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
A direct method to characterize a piezoelectric film has been developed. Based on the measured resonance spectrum of a composite resonator, the electromechanical coupling coefficient k(t)(2), density and elastic constant C-33(D) Of the piezoelectric film can be derived. Good agreement with experiment was obtained.
引用
收藏
页码：991 / 994
页数：4
相关论文
共 50 条
  • [1] Resonant spectrum method to characterize piezoelectric films in composite resonators
    Zhang, YX
    Wang, ZQ
    Cheeke, JDN
    [J]. IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2003, 50 (03) : 321 - 333
  • [2] Characterization for piezoelectric films using composite resonators
    Cheeke, JDN
    Zhang, Y
    Wang, Z
    Lukacs, M
    Sayer, M
    [J]. 1998 IEEE ULTRASONICS SYMPOSIUM - PROCEEDINGS, VOLS 1 AND 2, 1998, : 1125 - 1128
  • [3] Characterization for piezoelectric films using composite resonators
    Concordia Univ, Montreal, Canada
    [J]. Proceedings of the IEEE Ultrasonics Symposium, 1998, 2 : 1125 - 1128
  • [4] Characterization of pure ZnO thin films prepared by a direct photochemical method
    Buono-Core, G. E.
    Cabello, G.
    Klahn, A. H.
    Del Rio, R.
    Hill, R. H.
    [J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 2006, 352 (38-39) : 4088 - 4092
  • [5] A NOVEL CHARACTERIZATION METHOD FOR TEMPERATURE COMPENSATION OF COMPOSITE RESONATORS
    Lee, Hyung Kyu
    Yoneoka, Shingo
    Bahl, Gaurav
    Salvia, James
    Qu, Yu Qiao
    Melamud, Renata
    Chandorkar, Saurabh
    Kim, Bongsang
    Hopcroft, Matthew A.
    Kenny, Thomas W.
    [J]. MEMS 2010: 23RD IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2010, : 743 - 746
  • [6] Fabrication and Characterization of Carrageenan/ZnO/Chitosan Composite Films
    Lin, Yufeng
    Qiao, Cuixia
    Zhao, Zhihui
    Xia, Yanzhi
    Zhao, Gang
    Xue, Zhixin
    [J]. LANGMUIR, 2023, 39 (22) : 7930 - 7938
  • [7] PREPARATION AND CHARACTERIZATION OF ZNO FILMS BY AN EVAPORATING METHOD
    MA, J
    JI, F
    MA, HL
    LI, SY
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1995, 13 (01): : 92 - 94
  • [8] Characterization of electromechanical coupling coefficients of piezoelectric films using composite resonators
    Wang, ZG
    Zhang, YX
    Cheeke, JDN
    [J]. IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 1999, 46 (05) : 1327 - 1330
  • [9] Synthesis and characterization of multifunctional ZnO/polyester green composite films
    Sirohi, Sidhharth
    Singh, Ravinder
    Jain, Nishant
    Pani, Balaram
    Dutt, Krishna
    Nain, Ratyakshi
    [J]. JOURNAL OF POLYMER RESEARCH, 2017, 24 (11)
  • [10] Synthesis and characterization of multifunctional ZnO/polyester green composite films
    Sidhharth Sirohi
    Ravinder Singh
    Nishant Jain
    Balaram Pani
    Krishna Dutt
    Ratyakshi Nain
    [J]. Journal of Polymer Research, 2017, 24
12345