High temperature surface acoustic wave devices: fabrication and characterisation

被引：24
|
作者：
Thiele, JA
da Cunha, MP
机构：
[1] Univ Maine, Dept Elect & Comp Engn, Orono, ME 04469 USA
[2] Univ Maine, Surface Sci & Technol Lab, Orono, ME 04469 USA
来源：
ELECTRONICS LETTERS | 2003年 / 39卷 / 10期
关键词：
D O I：
10.1049/el:20030511
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Langasite (LGS) and quartz surface acoustic wave devices have been fabricated and tested up to 750degreesC, for frequency control applications and sensors. The measured magnitude of the transmission coefficient (\S-21\) and temperature coefficient of frequency (TCF) are compared to numerical predictions and verify quantitatively that the fabricated LGS devices maintain good operation up to 750degreesC, whereas quartz devices rapidly degrade at around 580degreesC due to the alpha beta (alpha to beta) transition.
引用
收藏
页码：818 / 819
页数：2
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