High Temperature Stability of Langasite Surface Acoustic Wave Devices

被引：0

作者：

da Cunha, M. Pereira ^{[1
]}

Lad, R. J. ^{[1
]}

Moonlight, T. ^{[1
]}

Bernhardt, G. ^{[1
]}

Frankel, D. J. ^{[1
]}

机构：

[1] Univ Maine, Surface Sci & Technol Lab, Orono, ME 04469 USA

来源：

2008 IEEE ULTRASONICS SYMPOSIUM, VOLS 1-4 AND APPENDIX | 2008年

关键词：

high temperature; thin film electrode; langasite; protective ceramic over-layer; harsh environment;

D O I：

暂无

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

High temperature acoustic wave (AW) devices capable of operating above 600 degrees C and in hostile environments have opened potential applications for monitoring industrial processes, power plants, and aerospace systems. The authors have reported on the development of thin film electrodes and protective ceramic layers to allow surface acoustic wave (SAW) device operation up to 800 degrees C on langasite (LGS) crystals. This success motivated further study of the electrode material and protective ceramic overlayer, as well as investigations of long term performance, temperature cycling and shock behavior, which are reported in this work. Among the results reported are: behavior of a co-deposited Pt/Rh/ZrO(2) composite electrode structure up to 1000 degrees C; investigation of oxygen rich and nitrogen rich SiAlON protective ceramic layers; long term (4080 hours, or about 51/2 months) operation of a two-port SAW resonator at 800 degrees C; cyclical thermal tests between room temperature and 850 degrees C; and thermal shock tests of crystals between 700 degrees C and room temperature.

引用

页码：205 / 208

页数：4

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