Langasite for high-temperature bulk acoustic wave applications

被引：121
|
作者：
Fritze, H [1 ]
Tuller, HL
机构：
[1] Tech Univ Clausthal, Dept Phys Met & Mat Sci, D-38678 Clausthal Zellerfeld, Germany
[2] MIT, Dept Mat Sci & Engn, Cambridge, MA 02139 USA
来源：
APPLIED PHYSICS LETTERS | 2001年 / 78卷 / 07期
关键词：
D O I：
10.1063/1.1345797
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Langasite (La3Ga5SiO14) and related compounds are promising candidates for high-temperature piezoelectric applications. To determine the stable operation of langasite as a high-temperature bulk acoustic wave (BAW) resonator, we characterized electrical conductivity [sigma (el)=1.56xexp(-1.07 eV/kT)S/cm] and oxygen diffusivity [D-ox(T)=5x10(-5) exp(-1.45 eV/kT)cm(2)/s] up to elevated temperatures. Langasite was successfully operated up to 900 degreesC as a BAW resonator with an average mass sensitivity of about 0.17 mug Hz(-1) cm(-2). This enables, in principle, high-temperature monitoring of deposition rates and thermogravimetry with high sensitivity. (C) 2001 American Institute of Physics.
引用
收藏
页码：976 / 977
页数：2
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