Thick photoresist original master: A new tool for fabrication of polymeric optical waveguides with large core by hot embossing

被引：2
|
作者：
Mizuno, H
Sugihara, O
Kaino, T
Ohe, Y
Okamoto, N
Hoshino, M
机构：
[1] Tohoku Univ, Inst Multidisciplinary Res Adv Mat, Aoba Ku, Sendai, Miyagi 9808577, Japan
[2] Shizuoka Univ, Grad Sch Sci & Technol, Hamamatsu, Shizuoka 4328561, Japan
[3] Tsuchiya Co Ltd, Dept Res & Dev, Chiryu 4720006, Japan
来源：
JOURNAL OF NONLINEAR OPTICAL PHYSICS & MATERIALS | 2004年 / 13卷 / 3-4期
关键词：
polymeric optical waveguide; hot embossing; thick photoresist;
D O I：
10.1142/S0218863504002183
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A simple and low-cost fabrication method of polymeric optical waveguides with large core sizes for plastic optical fibers is presented. The waveguides are fabricated by hot embossing with a rectangular ridge ultraviolet (UV)-cured epoxy resin stamper. The stamper is fabricated by replication of a rectangular groove mold that is made from silicone rubber replicated from a rectangular ridge original master made from thick photoresist (SU-8). A rectangular ridge shape of the original photoresist master of I mm size was realized by using a flattening process, which involves hot embossing before the exposure process and using a UV-cut filter during the exposure process.
引用
收藏
页码：513 / 517
页数：5
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