Fabrication of multimode polymeric waveguides by hot embossing process: Effect of sidewall roughness on insertion loss

被引:0
|
作者
Keun Byoung Yoon
机构
[1] Electronics and Telecommunications Research Institute,Optical Interconnection Team
来源
Macromolecular Research | 2004年 / 12卷
关键词
multimode polymeric waveguides; sidewall roughness; insertion loss; hot embossing;
D O I
暂无
中图分类号
学科分类号
摘要
We have fabricated a polymeric waveguide by using a hot embossing technique and have investigated its propagation loss. The replication of waveguide channels through the use of a hot embossing technique is of interest as a single-step process that could deliver surface roughnesses far smaller than the wavelength. We have evaluated experimentally that the sidewall roughness has a dominant effect on insertion losses of the multimode polymeric waveguide. The propagation loss of the waveguide decreased dramatically upon decreasing the sidewall roughness of the channel. We have confirmed that the preparation of waveguides having nanometer-scale sidewall roughness and 0.1 dB/cm propagation loss is possible when using the hot embossing technique.
引用
收藏
页码:437 / 442
页数:5
相关论文
共 50 条
  • [1] Fabrication of multimode polymeric waveguides by hot embossing process: Effect of sidewall roughness on insertion loss
    Yoon, KB
    [J]. MACROMOLECULAR RESEARCH, 2004, 12 (05) : 437 - 442
  • [2] Fabrication of multimode polymeric waveguides by hot embossing lithography
    Yoon, KB
    Choi, CG
    Han, SP
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2004, 43 (6A): : 3450 - 3451
  • [3] Effect of process parameters on sidewall roughness in polymeric optical waveguides
    Pani, SK
    Wong, CC
    Sudharsanam, K
    Mhaisalkar, SG
    Lim, V
    Mohanraj, S
    Ramana, PV
    [J]. THIN SOLID FILMS, 2004, 462 : 471 - 476
  • [4] Direct measurement of sidewall roughness of polymeric optical waveguides
    Pani, SK
    Wong, CC
    Sudharsanam, K
    Lim, V
    [J]. APPLIED SURFACE SCIENCE, 2005, 239 (3-4) : 445 - 450
  • [5] Optimization of Fabrication Parameters for Large-Core Polymeric Optical Waveguides by Hot Embossing
    Sugihara, O.
    Mizuno, H.
    Kaino, T.
    Tomiki, M.
    Okamoto, N.
    Ohama, M.
    [J]. NONLINEAR OPTICS QUANTUM OPTICS-CONCEPTS IN MODERN OPTICS, 2005, 33 (3-4): : 279 - 283
  • [6] Low-loss polymeric optical waveguides with large cores fabricated by hot embossing
    Mizuno, H
    Sugihara, O
    Kaino, T
    Okamoto, N
    Hosino, M
    [J]. OPTICS LETTERS, 2003, 28 (23) : 2378 - 2380
  • [7] Variation of sidewall roughness of polymeric waveguides during reactive ion etching
    Pani, SK
    Wong, CC
    Sudharsanam, K
    [J]. APPLIED PHYSICS LETTERS, 2004, 85 (07) : 1295 - 1297
  • [8] Fabrication of optical waveguides in thermosetting polymers using hot embossing
    Choi, CG
    [J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2004, 14 (07) : 945 - 949
  • [9] Fabrication of 2D polymer nanochannels by sidewall lithography and hot embossing
    Cheng, E.
    Zou, Helin
    Yin, Zhifu
    Jurcicek, Petr
    Zhang, Xi
    [J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2013, 23 (07)
  • [10] Thick photoresist original master: A new tool for fabrication of polymeric optical waveguides with large core by hot embossing
    Mizuno, H
    Sugihara, O
    Kaino, T
    Ohe, Y
    Okamoto, N
    Hoshino, M
    [J]. JOURNAL OF NONLINEAR OPTICAL PHYSICS & MATERIALS, 2004, 13 (3-4) : 513 - 517