Study of optical and piezoelectric properties of thin-film Si-SiO2-ZnO structure via pulsed-laser optoacoustic spectroscopy

被引：0
|
作者：
Grigor'ev, L. V. [1 ]
Mazurov, M. A. [1 ]
Shakin, O. V. [2 ]
Nefedov, V. G. [2 ]
Mikhailov, A. V. [3 ]
机构：
[1] St Petersburg Natl Res Univ Informat Technol Mech, St Petersburg, Russia
[2] St Petersburg State Univ Aerosp Instrumentat, St Petersburg, Russia
[3] AO SI Vavilov State Opt Inst, St Petersburg, Russia
来源：
JOURNAL OF OPTICAL TECHNOLOGY | 2017年 / 84卷 / 02期
基金：
俄罗斯基础研究基金会;
关键词：
ZINC-OXIDE;
D O I：
10.1364/JOT.84.000137
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
The results of an investigation of the optical and piezoelectric properties of a Si-SiO2-ZnO microstructure via pulsed-laser optoacoustic spectroscopy are presented. Using optoacoustic probing, the speed of an acoustic wave propagating in the zinc oxide layer was calculated to be 3.01 x 10(3) m/s, and the acoustic wave absorption coefficient was determined to be 3.45 dB/cm. The acousto-optic constant M-2 for the ZnO film was determined to be 8.78 x 10(-18) s(3)/g using the modified Dixon method. (C) 2017 Optical Society of America
引用
收藏
页码：137 / 139
页数：3
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