Analysis of an annular PZT actuator for a droplet ejector

被引：36
|
作者：
Wang, D.-A. [1 ]
Cheng, C.-H.
Hsieh, Y.-H.
Zhang, Z.-X.
机构：
[1] Natl Chung Hsing Univ, Inst Precis Engn, Taichung 402, Taiwan
[2] Da Yeh Univ, Changhua, Taiwan
[3] Au Optronics, Hsinchu, Taiwan
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 2007年 / 137卷 / 02期
关键词：
PZT actuator; analytical analysis; droplet ejector; electroforming;
D O I：
10.1016/j.sna.2007.03.020
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
An analytical solution for deflection of an annular lead zirconate titanate (PZT) actuator with application in droplet ejection is developed. A linear strain distribution across the thickness direction is assumed in the derivation of the analytical solution. The analytical results agree well with finite element analyses. Fabrication process of a droplet ejector actuated by the PZT is described. The PZT is prepared by powder metallurgy and patterned with poling electrodes. The ejector is fabricated by nickel electroforming. Experimental results of static deflection of the fabricated device confirm the effectiveness of the analytical solution. Droplet ejection of the ejector is demonstrated. (c) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码：330 / 337
页数：8
相关论文
共 50 条
  • [41] Micro in-pipe robots with PZT actuator
    Sun, L
    Sun, P
    Luo, Y
    Zhang, Y
    Gong, Z
    CLIMBING AND WALKING ROBOTS, 2001, : 539 - 546
  • [42] Pressure regulator for pneumatic valve with a PZT actuator
    Yun, So-Nam
    Ham, Young-Bog
    Park, Jung-Ho
    Ryu, Byung-Soon
    Choi, Byung-Oh
    2006 SICE-ICASE INTERNATIONAL JOINT CONFERENCE, VOLS 1-13, 2006, : 991 - +
  • [43] Starting pressure and hysteresis behavior of an annular injection supersonic ejector
    Kim, Sehoon
    Kwon, Sejin
    AIAA JOURNAL, 2008, 46 (05) : 1039 - 1044
  • [44] Analysis and experiment of a novel actuating design with a shear mode PZT actuator for microfluidic application
    Chen, S. C.
    Cheng, C. H.
    Lin, Y. C.
    SENSORS AND ACTUATORS A-PHYSICAL, 2007, 135 (01) : 1 - 9
  • [45] Measurement and analysis of droplet parameters in annular mist flow based on image method
    Ding H.
    Liu X.
    Li J.
    Sun H.
    Liang Z.
    Huagong Jinzhan/Chemical Industry and Engineering Progress, 2021, 40 (12): : 6460 - 6468
  • [46] ANNULAR ULTRASONIC MICROMOTORS FABRICATED FROM BULK PZT
    Hareesh, Prakruthi
    DeVoe, Don L.
    30TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2017), 2017, : 765 - 768
  • [47] Nozzleless Acoustic Droplet Ejector With Electrically Tunable Droplet Size for Picking and Placing Semiconductor Chips
    Tang, Yongkui
    Kim, Eun Sok
    JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2021, 30 (02) : 262 - 270
  • [48] Peptide Synthesis on Glass Substrate Using Acoustic Droplet Ejector
    Choe, Youngki
    Chen, Shih-Jui
    Kim, Eun Sok
    IEEE TRANSACTIONS ON BIOMEDICAL ENGINEERING, 2014, 61 (03) : 705 - 710
  • [49] Sensing capability of a PZT-driven cantilever actuator
    Xu, LM
    Ling, SF
    Lu, B
    Li, H
    Hu, H
    SENSORS AND ACTUATORS A-PHYSICAL, 2006, 127 (01) : 1 - 8
  • [50] Kinetic Study of PZT Inertial Micro Rotary Actuator
    Ma Jijie
    Wen Jianming
    Cheng Guangming
    Li Ning
    Jiang Yonghua
    ADVANCED MANUFACTURING TECHNOLOGY, PTS 1-4, 2012, 472-475 : 2410 - +
12345