Analysis of an annular PZT actuator for a droplet ejector

被引：36
|
作者：
Wang, D.-A. [1 ]
Cheng, C.-H.
Hsieh, Y.-H.
Zhang, Z.-X.
机构：
[1] Natl Chung Hsing Univ, Inst Precis Engn, Taichung 402, Taiwan
[2] Da Yeh Univ, Changhua, Taiwan
[3] Au Optronics, Hsinchu, Taiwan
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 2007年 / 137卷 / 02期
关键词：
PZT actuator; analytical analysis; droplet ejector; electroforming;
D O I：
10.1016/j.sna.2007.03.020
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
An analytical solution for deflection of an annular lead zirconate titanate (PZT) actuator with application in droplet ejection is developed. A linear strain distribution across the thickness direction is assumed in the derivation of the analytical solution. The analytical results agree well with finite element analyses. Fabrication process of a droplet ejector actuated by the PZT is described. The PZT is prepared by powder metallurgy and patterned with poling electrodes. The ejector is fabricated by nickel electroforming. Experimental results of static deflection of the fabricated device confirm the effectiveness of the analytical solution. Droplet ejection of the ejector is demonstrated. (c) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码：330 / 337
页数：8
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