Analysis of an annular PZT actuator for a droplet ejector

被引：36
|
作者：
Wang, D.-A. [1 ]
Cheng, C.-H.
Hsieh, Y.-H.
Zhang, Z.-X.
机构：
[1] Natl Chung Hsing Univ, Inst Precis Engn, Taichung 402, Taiwan
[2] Da Yeh Univ, Changhua, Taiwan
[3] Au Optronics, Hsinchu, Taiwan
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 2007年 / 137卷 / 02期
关键词：
PZT actuator; analytical analysis; droplet ejector; electroforming;
D O I：
10.1016/j.sna.2007.03.020
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
An analytical solution for deflection of an annular lead zirconate titanate (PZT) actuator with application in droplet ejection is developed. A linear strain distribution across the thickness direction is assumed in the derivation of the analytical solution. The analytical results agree well with finite element analyses. Fabrication process of a droplet ejector actuated by the PZT is described. The PZT is prepared by powder metallurgy and patterned with poling electrodes. The ejector is fabricated by nickel electroforming. Experimental results of static deflection of the fabricated device confirm the effectiveness of the analytical solution. Droplet ejection of the ejector is demonstrated. (c) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码：330 / 337
页数：8
相关论文
共 50 条
  • [1] PZT actuator applied to a femto-liter droplet ejector
    A. S. Yang
    C. H. Cheng
    F. S. Hsu
    Journal of Mechanical Science and Technology, 2007, 21 : 1732 - 1738
  • [2] PZT actuator applied to a femto-liter droplet ejector
    Yang, A. S.
    Cheng, C. H.
    Hsu, F. S.
    JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY, 2007, 21 (10) : 1732 - 1738
  • [3] Modality analysis on PZT bimorph actuator
    Gong, Zhenbang
    Luo, Yi
    Sun, Linzhi
    2005 IEEE International Conference on Mechatronics and Automations, Vols 1-4, Conference Proceedings, 2005, : 1863 - 1866
  • [4] The design of a droplet ejector
    Grassia, P
    JOURNAL OF FLUIDS ENGINEERING-TRANSACTIONS OF THE ASME, 1999, 121 (03): : 658 - 664
  • [5] The design of a droplet ejector
    Department of Chemical Engineering, UMIST, PO Box 88, Manchester M60 1QD, United Kingdom
    J Fluids Eng Trans ASME, 3 (658-664):
  • [6] Harmonic Analysis of a PZT Poly-Actuator
    Tones, James
    Asada, H. Harry
    2015 IEEE INTERNATIONAL CONFERENCE ON ROBOTICS AND AUTOMATION (ICRA), 2015, : 842 - 849
  • [7] Modal analysis of PZT bimorph actuator for microrobot
    Luo, Y.
    Gong, Z.B.
    Sun, L.Z.
    Wang, Q.Q
    Gaojishu Tongxin/High Technology Letters, 2001, 11 (03):
  • [8] Micromachined droplet ejector arrays
    Perçin, G
    Yaralioglu, GG
    Khuri-Yakub, BT
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2002, 73 (12): : 4385 - 4389
  • [9] Analytical analysis of a circular PZT actuator for valveless micropumps
    Li, SF
    Chen, SC
    SENSORS AND ACTUATORS A-PHYSICAL, 2003, 104 (02) : 151 - 161
  • [10] Fabrication and performance analysis of electrostatic micro-droplet ejector
    Son, SU
    Oh, JT
    Lee, S
    Ko, HS
    Kim, Y
    Byun, D
    Yang, JH
    Kim, HC
    2005 IEEE International Conference on Mechatronics, 2005, : 266 - 269
12345