Resistive-nanoindentation: contact area monitoring by real-time electrical contact resistance measurement

被引:9
|
作者
Comby-Dassonneville, Solene [1 ]
Volpi, Fabien [1 ]
Parry, Guillaume [1 ]
Pellerin, Didier [2 ]
Verdier, Marc [1 ]
机构
[1] Univ Grenoble Alpes, CNRS, Grenoble INP, SIMaP, F-38000 Grenoble, France
[2] Scientec CSInstruments, F-91940 Les Ulis, France
关键词
ELASTIC-MODULUS; INSTRUMENTED INDENTATION; CONSTRICTION RESISTANCE; PHASE-TRANSFORMATIONS; METAL-SURFACES; MICROSCOPY; GERMANIUM; HARDNESS; SILICON; TIP;
D O I
10.1557/mrc.2019.74
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In the past decades, efforts have been made to couple nanoindentation with resistive measurements in order to monitor the real-time contact area, as an alternative to the use of traditional analytical models. In this work, a novel and efficient stand-alone method is proposed to compute the contact area using resistive-nanoindentation of noble metals (bulk or thin films). This method relies on three steps: tip shape measurement, set-up calibration, application to the sample to be characterized. The procedure is applied to nanoindentation tests on a sample with film-on-elastic-substrate rheology and is successfully validated against experimental measurements of the contact area.
引用
收藏
页码:1008 / 1014
页数:7
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