A metamorphic heterostructure field-effect transistor with a double delta-doped channel

被引:5
|
作者
Huang, Dong-Hai
Hsu, Wei-Chou
Lin, Yu-Shyan
Yeh, Jung-Han
Huang, Jun-Chin
机构
[1] Natl Cheng Kung Univ, Dept Elect Engn, Inst Microelect, Tainan 70101, Taiwan
[2] Natl Dong Hwa Univ, Dept Mat Sci & Engn, Shoufeng, Hualien, Taiwan
关键词
D O I
10.1088/0268-1242/22/7/018
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This study presents a metamorphic heterostructure field-effect transistor with a double delta-doped channel (MDDFET). The coupled delta-doped In0.5Ga0.5As/delta(+)/ In0.5Ga0.5As/ In0.6Ga0.4As/ In0.5Ga0.5As/delta(+)/ In0.5Ga0.5As channel demonstrates high carrier concentration and high mobility due to the good carrier confinement of the delta-doped design and the coupled wavefunction in the undoped In-rich channel. Experimental results indicate that the MDDFET with the gate dimension of 0.65 x 100 mu m(2) exhibits a maximum extrinsic transconductance of 320 mS mm(-1), a saturated drain current density of 566 mA mm(-1) at V-GS = 0 V, a cut-off frequency of 45 GHz, a maximum oscillation frequency of 125 GHz and a saturated power of 15.9 dBm at 5.8 GHz. These results demonstrate that this studied device is appropriate for high-frequency and high-power applications.
引用
收藏
页码:784 / 787
页数:4
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