Interference microscopy for three-dimensional imaging with wavelength-to-depth encoding

被引：12
|
作者：
Li, GQ [1 ]
Sun, PC [1 ]
Lin, PC [1 ]
Fainman, Y [1 ]
机构：
[1] Univ Calif San Diego, Dept Elect & Comp Engn, La Jolla, CA 92093 USA
来源：
OPTICS LETTERS | 2000年 / 25卷 / 20期
关键词：
D O I：
10.1364/OL.25.001505
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A novel interference microscope for three-dimensional (3D) imaging based on a wavelength-to-depth encoding technique is presented. Wavelength-to-depth encoding. is realized by use of a diffractive lens and wavelength tuning. A high depth resolution of 0.71 mu m is obtained with 0.90-N.A. objective lenses. Experimental measurements of a four-level grating are presented, and the results are found to be comparable with those obtained with a Dektak profilometer and a similar interference microscope that uses mechanical depth scanning. The system is promising for fast, noncontact, high-resolution 3D imaging. (C) 2000 Optical Society of America OCIS codes: 110.6880, 120.4290, 170.1650, 180.3170.
引用
收藏
页码：1505 / 1507
页数：3
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