Interference microscopy for three-dimensional imaging with wavelength-to-depth encoding

被引：12

作者：

Li, GQ ^{[1
]}

Sun, PC ^{[1
]}

Lin, PC ^{[1
]}

Fainman, Y ^{[1
]}

机构：

[1] Univ Calif San Diego, Dept Elect & Comp Engn, La Jolla, CA 92093 USA

来源：

OPTICS LETTERS | 2000年 / 25卷 / 20期

关键词：

D O I：

10.1364/OL.25.001505

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A novel interference microscope for three-dimensional (3D) imaging based on a wavelength-to-depth encoding technique is presented. Wavelength-to-depth encoding. is realized by use of a diffractive lens and wavelength tuning. A high depth resolution of 0.71 mu m is obtained with 0.90-N.A. objective lenses. Experimental measurements of a four-level grating are presented, and the results are found to be comparable with those obtained with a Dektak profilometer and a similar interference microscope that uses mechanical depth scanning. The system is promising for fast, noncontact, high-resolution 3D imaging. (C) 2000 Optical Society of America OCIS codes: 110.6880, 120.4290, 170.1650, 180.3170.

引用

页码：1505 / 1507

页数：3

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