Parameters optimization on the lapping process for advanced ceramics by applying Taguchi method

被引：2
|
作者：
Yuan, Julong [1 ]
Lv, Binghai [1 ,2 ]
Zhou, Zhaozhong [1 ]
Tao, Baochun [1 ]
机构：
[1] Zhejiang Univ Technol, Ultraprecis Machining Res Ctr, Hangzhou 310014, Peoples R China
[2] Harbin Inst Technol, Dept Engn Mech, Harbin 15001, Peoples R China
来源：
ADVANCES IN MATERIALS MANUFACTURING SCIENCE AND TECHNOLOGY II | 2006年 / 532-533卷
关键词：
optimum design; Taguchi method; advanced ceramics; lapping;
D O I：
10.4028/www.scientific.net/MSF.532-533.488
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The surface quality is a critical factor affecting the performance and reliability of advanced ceramics. This paper focuses on the application of Taguchi method for optimization of advanced ceramics lapping process parameters to obtain the best finish. An optimization experiment for lapping silicon wafer with Al2O3 was designed by Taguchi method. Surface roughness Ra and Rt are considered as criteria for optimization. Influence of parameters involving load, speed, and slurry concentration for a given workmaterial with given abrasive (material and size) are discussed, and the optimum lapping conditions are figured out. Compared with single parameter experimental results, it illustrates that the experiment design based on Taguchi method can successfully applied to determine the optimum processing conditions for advanced ceramics lapping process.
引用
收藏
页码：488 / +
页数：2
相关论文
共 50 条
  • [11] Societal Application of Taguchi Method for Optimization of Process Parameters in the Melting Process in the Foundry
    Deshmukh, Ranjitsinh
    Hiremath, Rahul
    TECHNO-SOCIETAL 2018: PROCEEDINGS OF THE 2ND INTERNATIONAL CONFERENCE ON ADVANCED TECHNOLOGIES FOR SOCIETAL APPLICATIONS - VOL 2, 2020, : 215 - 221
  • [12] Taguchi's optimization of process parameters for production accuracy in ultrasonic drilling of engineering ceramics
    Jadoun, R. S.
    Kumar, Pradeep
    Mishra, B. K.
    PRODUCTION ENGINEERING-RESEARCH AND DEVELOPMENT, 2009, 3 (03): : 243 - 253
  • [13] Optimization of Process Parameters of Die Slide Injection by Using Taguchi Method
    Jeong, Soo-Jin
    Moon, Seong-Joon
    Jeoung, Sun-Kyoung
    Lee, Pyoung-Chan
    Moon, Ju-ho
    KOREAN CHEMICAL ENGINEERING RESEARCH, 2012, 50 (02): : 264 - 269
  • [14] Optimization of process parameters in drilling of GFRP composite using Taguchi method
    Vankanti, Vinod Kumar
    Ganta, Venkateswarlu
    JOURNAL OF MATERIALS RESEARCH AND TECHNOLOGY-JMR&T, 2014, 3 (01): : 35 - 41
  • [15] Optimization of Process Parameters in Oriented Strand Board Manufacturing by Taguchi Method
    Hamzacebi, Coskun
    BIORESOURCES, 2016, 11 (03): : 5987 - 5993
  • [16] OPTIMIZATION OF PROCESS PARAMETERS IN DRILLING OF SMC COMPOSITES USING TAGUCHI METHOD
    Can, Ahmet
    Unuvar, Ali
    TEHNICKI VJESNIK-TECHNICAL GAZETTE, 2017, 24 (02): : 435 - 442
  • [17] Optimization of machining parameters in rotary EDM process by using the Taguchi method
    Aliakbari, E.
    Baseri, H.
    INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, 2012, 62 (9-12): : 1041 - 1053
  • [18] Optimization of Robotic Spray Painting process Parameters using Taguchi Method
    Chidhambara, K. V.
    Shankar, B. Latha
    Vijaykumar
    INTERNATIONAL CONFERENCE ON ADVANCES IN MATERIALS AND MANUFACTURING APPLICATIONS (ICONAMMA-2017), 2018, 310
  • [19] Optimization of machining parameters in rotary EDM process by using the Taguchi method
    E. Aliakbari
    H. Baseri
    The International Journal of Advanced Manufacturing Technology, 2012, 62 : 1041 - 1053
  • [20] Optimization of GMAW Protocols and Parameters for Improving Weld Strength Quality Applying the Taguchi Method
    Achebo, Joseph I.
    WORLD CONGRESS ON ENGINEERING, WCE 2011, VOL I, 2011, : 667 - 670
12345