Carbon nanotube gas sensor fabricated on anodic aluminum oxide

被引：0
|
作者：
Hoa, Nguyen Duc [1 ]
Van Quy, Nguyen [1 ]
Choi, Gyuseok [1 ]
Cho, Yousuk [1 ]
Jeong, Se Young [1 ]
Kim, Dojin [1 ]
机构：
[1] Chungnam Natl Univ, Dept Mat Sci & Engn, Daejeon, South Korea
来源：
ADVANCES IN NANOMATERIALS AND PROCESSING, PTS 1 AND 2 | 2007年 / 124-126卷
关键词：
CNTs; AAO; gas senor;
D O I：
10.4028/www.scientific.net/SSP.124-126.1309
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
A new type of gas sensor was realized by directly depositing carbon nanotube on nano channels of the anodic alumina oxide (AAO) fabricated on p-type silicon substrate. The carbon nanotubes were synthesized by thermal chemical vapor deposition at a very high temperature of 1200 degrees C to improve the crystallinity. The device fabrication process was also developed. The contact of carbon nanotubes and p-type Si substrate showed a Schottky behavior, and the Schottky barrier height increased with exposure to gases while the overall conductivity decreased. The sensors showed fast response and recovery to ammonia gas upon the filling (400 mTorr) and evacuation.
引用
收藏
页码：1309 / +
页数：2
相关论文
共 50 条
  • [41] Magnetic properties of Ni nanostructures fabricated using anodic aluminum oxide templates
    Kim, MJ
    Kim, YW
    Lee, JS
    Yoo, JB
    Park, CY
    Bae, CJ
    Park, JG
    [J]. JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2005, 47 (02) : 313 - 317
  • [42] Nanopatterned Silicon Emitters of a Solar Cell Fabricated by Anodic Aluminum Oxide Masks
    Choi, Jaeho
    Parida, Bhaskar
    Lee, Jung Tack
    Kim, Keunjoo
    [J]. JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2011, 11 (07) : 6318 - 6322
  • [43] Magnetic nanowires fabricated by anodic aluminum oxide template-a brief review
    Li Wuxia
    Zhang Jun
    Shen TieHan
    Jones, Grenville A.
    Grundy, Philip J.
    [J]. SCIENCE CHINA-PHYSICS MECHANICS & ASTRONOMY, 2011, 54 (07) : 1181 - 1189
  • [44] The nanoporous structure of anodic aluminum oxide fabricated on the Au/Nb/Si substrate
    Zhao, Xiaowei
    Lee, Ung-Ju
    Seo, Seok-Kyoo
    Lee, Kun-Hong
    [J]. MATERIALS SCIENCE & ENGINEERING C-BIOMIMETIC AND SUPRAMOLECULAR SYSTEMS, 2009, 29 (04): : 1156 - 1160
  • [45] Electric Conduction Mechanism of Resistive Switching Memory Fabricated with Anodic Aluminum Oxide
    Otsuka, S.
    Shimizu, T.
    Shingubara, S.
    Iwata, N.
    Watanabe, T.
    Takano, Y.
    Takase, K.
    [J]. NONVOLATILE MEMORIES, 2013, 50 (34): : 49 - 54
  • [46] Fabrication and characterization of CdS nanotube arrays in porous anodic aluminum oxide templates
    Peng, TY
    Yang, HP
    Dai, K
    Pu, XL
    Hirao, K
    [J]. CHEMICAL PHYSICS LETTERS, 2003, 379 (5-6) : 432 - 436
  • [47] Carbon nanotubes prepared by anodic aluminum oxide template method
    HOU PengXiang
    [J]. Science Bulletin, 2012, (Z1) : 187 - 204
  • [48] Carbon nanotubes prepared by anodic aluminum oxide template method
    HOU PengXiangLIU ChangSHI Chao CHENG HuiMing Shenyang National Laboratory for Materials ScienceInstitute of Metal ResearchChinese Academy of SciencesShenyang China
    [J]. Chinese Science Bulletin, 2012, 57(Z1) (Z1) : 187 - 204
  • [49] Stepped carbon nanotubes synthesized in anodic aluminum oxide templates
    Im, WS
    Cho, YS
    Choi, GS
    Yu, FC
    Kim, DJ
    [J]. DIAMOND AND RELATED MATERIALS, 2004, 13 (4-8) : 1214 - 1217
  • [50] Carbon nanotubes prepared by anodic aluminum oxide template method
    Hou PengXiang
    Liu Chang
    Shi Chao
    Cheng HuiMing
    [J]. CHINESE SCIENCE BULLETIN, 2012, 57 (2-3): : 187 - 204
12345