Carbon nanotube gas sensor fabricated on anodic aluminum oxide

被引：0
|
作者：
Hoa, Nguyen Duc [1 ]
Van Quy, Nguyen [1 ]
Choi, Gyuseok [1 ]
Cho, Yousuk [1 ]
Jeong, Se Young [1 ]
Kim, Dojin [1 ]
机构：
[1] Chungnam Natl Univ, Dept Mat Sci & Engn, Daejeon, South Korea
来源：
ADVANCES IN NANOMATERIALS AND PROCESSING, PTS 1 AND 2 | 2007年 / 124-126卷
关键词：
CNTs; AAO; gas senor;
D O I：
10.4028/www.scientific.net/SSP.124-126.1309
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
A new type of gas sensor was realized by directly depositing carbon nanotube on nano channels of the anodic alumina oxide (AAO) fabricated on p-type silicon substrate. The carbon nanotubes were synthesized by thermal chemical vapor deposition at a very high temperature of 1200 degrees C to improve the crystallinity. The device fabrication process was also developed. The contact of carbon nanotubes and p-type Si substrate showed a Schottky behavior, and the Schottky barrier height increased with exposure to gases while the overall conductivity decreased. The sensors showed fast response and recovery to ammonia gas upon the filling (400 mTorr) and evacuation.
引用
收藏
页码：1309 / +
页数：2
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