Carbon nanotube gas sensor fabricated on anodic aluminum oxide

被引：0
|
作者：
Hoa, Nguyen Duc [1 ]
Van Quy, Nguyen [1 ]
Choi, Gyuseok [1 ]
Cho, Yousuk [1 ]
Jeong, Se Young [1 ]
Kim, Dojin [1 ]
机构：
[1] Chungnam Natl Univ, Dept Mat Sci & Engn, Daejeon, South Korea
来源：
ADVANCES IN NANOMATERIALS AND PROCESSING, PTS 1 AND 2 | 2007年 / 124-126卷
关键词：
CNTs; AAO; gas senor;
D O I：
10.4028/www.scientific.net/SSP.124-126.1309
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
A new type of gas sensor was realized by directly depositing carbon nanotube on nano channels of the anodic alumina oxide (AAO) fabricated on p-type silicon substrate. The carbon nanotubes were synthesized by thermal chemical vapor deposition at a very high temperature of 1200 degrees C to improve the crystallinity. The device fabrication process was also developed. The contact of carbon nanotubes and p-type Si substrate showed a Schottky behavior, and the Schottky barrier height increased with exposure to gases while the overall conductivity decreased. The sensors showed fast response and recovery to ammonia gas upon the filling (400 mTorr) and evacuation.
引用
收藏
页码：1309 / +
页数：2
相关论文
共 50 条
  • [1] Field emission property of carbon nanotube field emitters in triode structure fabricated with anodic aluminum oxide templates
    Li, Yiming
    Cheng, Hui-Wen
    Lin, Chen-Chun
    Pan, Fu-Ming
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 2008, 47 (04) : 3282 - 3286
  • [2] Synthesis of carbon nanotube composites in nanochannels of an anodic aluminum oxide film
    Kyotani, T
    Pradhan, BK
    Tomita, A
    [J]. BULLETIN OF THE CHEMICAL SOCIETY OF JAPAN, 1999, 72 (09) : 1957 - 1970
  • [3] Multiwall carbon nanotube gas sensor fabricated using thermomechanical structure
    Cho, WS
    Moon, SI
    Lee, YD
    Lee, YH
    Park, JH
    Ju, BK
    [J]. IEEE ELECTRON DEVICE LETTERS, 2005, 26 (07) : 498 - 500
  • [4] An ammonia gas sensor based on non-catalytically synthesized carbon nanotubes on an anodic aluminum oxide template
    Hoa, Nguyen Duc
    Van Quy, Nguyen
    Cho, Yousuk
    Kim, Dojin
    [J]. SENSORS AND ACTUATORS B-CHEMICAL, 2007, 127 (02) : 447 - 454
  • [5] Schottky-type response of carbon nanotube NO2 gas sensor fabricated onto aluminum electrodes by dielectrophoresis
    Suehiro, J
    Imakiire, H
    Hidaka, S
    Ding, WD
    Zhou, GB
    Imasaka, K
    Hara, M
    [J]. SENSORS AND ACTUATORS B-CHEMICAL, 2006, 114 (02): : 943 - 949
  • [6] Fabrication temperature effect of the field emission from closed and open tip carbon nanotube arrays fabricated on anodic aluminum oxide films
    Kang, DW
    Suh, JS
    [J]. JOURNAL OF APPLIED PHYSICS, 2004, 96 (09) : 5234 - 5238
  • [7] Synthesis of carbon nanotube arrays using ethanol in porous anodic aluminum oxide template
    Yu, GJ
    Wang, S
    Gong, JL
    Zhu, DZ
    He, SX
    Li, YL
    Zhu, ZY
    [J]. CHINESE SCIENCE BULLETIN, 2005, 50 (11): : 1097 - 1100
  • [8] Synthesis of carbon nanotube arrays using ethanol in porous anodic aluminum oxide template
    YU Guojun
    [J]. Science Bulletin, 2005, (11) : 1097 - 1100
  • [9] Amorphous carbon coated silicon nanotips fabricated by MPCVD using anodic aluminum oxide as the template
    Chen, Te-Ming
    Pan, Fu-Ming
    Hung, Jui-Yi
    Chang, L.
    Wu, Shich-Chuan
    Chen, Chia-Fu
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2007, 154 (04) : D215 - D219
  • [10] Improved carbon nanotube growth inside an anodic aluminum oxide template using microwave radiation
    Dadras, Sedigheh
    Faraji, Maryam
    [J]. JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 2018, 116 : 203 - 208
12345