Particle removal efficiency evaluation of filters inIPA

被引：0
|
作者：
Takakura, Tomoyuki [1 ]
Tsuzuki, Shuichi [1 ]
机构：
[1] Nihon Pall Ltd, 46 Kasuminosato, Ami, Ibaraki 3000315, Japan
来源：
INTERNATIONAL SYMPOSIUM ON SEMICONDUCTOR MANUFACTURING (ISSM) 2016 PROCEEDINGS OF TECHNICAL PAPERS | 2016年
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D O I：
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中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
As part of the study to investigate filter performance in the actual conditions. particle removal efficiency evaluation method offilters in isopropyl alcohol was developed. Three kinds of particles which exhibit each different charged state in the chemical, and the sizes of which are around 10 nm, were selected as test particles for the evaluation. Pall lO-nm-rated surface-modified PTFE membrane filter was evaluated with the particles. The result was compared with the removal efficiency in deionized water. Also, the effect of adsorption on the removal efficiency in the system was discussed.
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页数：4
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