Particle removal efficiency evaluation of filters inIPA

被引：0
|
作者：
Takakura, Tomoyuki [1 ]
Tsuzuki, Shuichi [1 ]
机构：
[1] Nihon Pall Ltd, 46 Kasuminosato, Ami, Ibaraki 3000315, Japan
来源：
INTERNATIONAL SYMPOSIUM ON SEMICONDUCTOR MANUFACTURING (ISSM) 2016 PROCEEDINGS OF TECHNICAL PAPERS | 2016年
关键词：
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
As part of the study to investigate filter performance in the actual conditions. particle removal efficiency evaluation method offilters in isopropyl alcohol was developed. Three kinds of particles which exhibit each different charged state in the chemical, and the sizes of which are around 10 nm, were selected as test particles for the evaluation. Pall lO-nm-rated surface-modified PTFE membrane filter was evaluated with the particles. The result was compared with the removal efficiency in deionized water. Also, the effect of adsorption on the removal efficiency in the system was discussed.
引用
收藏
页数：4
相关论文
共 50 条
  • [31] Removal efficiency of pressurized sand filters during the filtration process
    Mesquita, Marcio
    de Deus, Fabio Ponciano
    Testezlaf, Roberto
    Diotto, Adriano Valentim
    DESALINATION AND WATER TREATMENT, 2019, 161 : 132 - 143
  • [32] The influence of fluctuations on the efficiency of aerosol particle collection with fibrous filters
    Chernyakov, AL
    COLLOID JOURNAL, 2004, 66 (03) : 355 - 366
  • [33] The Influence of Fluctuations on the Efficiency of Aerosol Particle Collection with Fibrous Filters
    A. L. Chernyakov
    Colloid Journal, 2004, 66 : 355 - 366
  • [34] The influence of fluctuations on the efficiency of aerosol particle collection with fibrous filters
    Chernyakov, A.L.
    Kolloidnyj Zhurnal, 2004, 66 (03): : 401 - 413
  • [35] Exploration of Ultralight Nanofiber Aerogels as Particle Filters: Capacity and Efficiency
    Deuber, Fabian
    Mousavi, Sara
    Federer, Lukas
    Hofer, Marco
    Adlhart, Christian
    ACS APPLIED MATERIALS & INTERFACES, 2018, 10 (10) : 9069 - 9076
  • [36] ATMOSPHERIC PARTICLE PENETRATION THROUGH HIGH-EFFICIENCY FILTERS
    LIEBERMA.A
    SCOTT, RD
    POWDER TECHNOLOGY, 1973, 8 (3-4) : 183 - 189
  • [37] Comparison of the efficiency of prestorage leukocyte removal filters in leukocyte removal and in prevention of cytokine production
    Huang, ST
    Sutton, J
    Lok, HT
    Huang, Z
    TRANSFUSION, 1998, 38 (10) : 40S - 40S
  • [38] Prediction for particle removal efficiency of a reverse jet scrubber
    Lim, K. S.
    Lee, S. H.
    Park, H. S.
    JOURNAL OF AEROSOL SCIENCE, 2006, 37 (12) : 1826 - 1839
  • [39] Reduced Particle Removal Efficiency Upon Wafer Storage
    Knotter, D. Martin
    Roucou, Romuald
    Peyrin, Remi
    ULTRA CLEAN PROCESSING OF SEMICONDUCTOR SURFACES IX: UCPSS 2008-9TH INTERNATIONAL SYMPOSIUM ON ULTRA CLEAN PROCESSING OF SEMICONDUCTOR SURFACES (UCPSS), 2009, 145-146 : 61 - +
  • [40] The effects of RCA clean variables on particle removal efficiency
    Sahari, Siti Kudnie
    Sing, Jane Chai Hai
    Hamid, Khairuddin Ab.
    World Academy of Science, Engineering and Technology, 2009, 38 : 634 - 636
12345