The Characteristic of GZO Thin Film Deposited on Flexible Substrates by Using RF Magnetron Sputtering

被引：0
|
作者：
Chen, TaoHsing [1 ]
Chiang, Chia-Ching [1 ]
Chen, Ting-You [1 ]
机构：
[1] Natl Kaohsiung Univ Appl Sci, Dept Mech Engn, Kaohsiung 807, Taiwan
来源：
2014 21ST INTERNATIONAL WORKSHOP ON ACTIVE-MATRIX FLATPANEL DISPLAYS AND DEVICES (AM-FPD) | 2014年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this study, we investigate the optical and electrical properties of ZnO:Ga (GZO) films on polyimide flexible substrates by using radio frequency magnetron sputtering(RF-sputtering). The structural, electric and optical characteristics of GZO thin films with various deposition parameters were investigated. All films illustrate strong (002) for GZO preferential orientation by using XRD analysis. The results show that the optical transmittance of GZO thin film exhibited an excellent transparency in the visible light field. Moreover, the resistivity of GZO decrease with increasing deposited time,
引用
收藏
页码：199 / 202
页数：4
相关论文
共 50 条
  • [11] Growth of TiO2 Thin Film on Various Substrates using RF Magnetron Sputtering
    Ali, Riyaz Ahmad Mohamed
    Nayan, Nafarizal
    MALAYSIA ANNUAL PHYSICS CONFERENCE 2010 (PERFIK-2010), 2011, 1328 : 190 - 192
  • [12] Electrochemical performance of CuO thin film deposited by RF reactive magnetron sputtering
    School of Chemical Engineering and Environment Science, Beijing Institute of Technology, Beijing 100081, China
    不详
    不详
    Gongneng Cailiao, 2007, 7 (1149-1151):
  • [13] Photoluminescence of ZnO:Er Thin Film Phosphors Deposited by RF Magnetron Sputtering
    Song, Hyundon
    Kim, Young Jin
    KOREAN JOURNAL OF MATERIALS RESEARCH, 2006, 16 (07): : 401 - 407
  • [14] The Mg doping GZO thin films for optical and electrical application by using RF magnetron sputtering
    Chen, Tao-Hsing
    Yang, Chia-Lin
    OPTICAL AND QUANTUM ELECTRONICS, 2016, 48 (12)
  • [15] The Mg doping GZO thin films for optical and electrical application by using RF magnetron sputtering
    Tao-Hsing Chen
    Chia-Lin Yang
    Optical and Quantum Electronics, 2016, 48
  • [16] Photocatalytic TiO2 thin films deposited on flexible substrates by radio frequency (RF) reactive magnetron sputtering
    Chen, D. Y.
    Tsao, C. C.
    Hsu, C. Y.
    CURRENT APPLIED PHYSICS, 2012, 12 (01) : 179 - 183
  • [17] Effects of Power on Properties of ZnO:Al Films Deposited on Flexible Substrates by RF Magnetron Sputtering
    Wang, Xiaojing
    Lei, Qingsong
    Yuan, Junming
    Zhou, Weili
    Yu, Jun
    ENERGY AND ENVIRONMENT MATERIAL S, 2010, 650 : 163 - 167
  • [18] Effect of Annealing on LiCoO2 Thin Film Deposited by RF Magnetron Sputtering
    Benzarti, Zohra
    Castro, Jose David
    Carneiro, Edgar
    Pacheco, Lara
    Duarte, Nelson
    Carvalho, Sandra
    Serra, Ricardo
    Cavaleiro, Albano
    Alves, Cristiana
    Cruz, Sandra
    MATERIALS, 2025, 18 (06)
  • [19] BATIO3 THIN-FILM CAPACITORS DEPOSITED BY RF MAGNETRON SPUTTERING
    JIA, QX
    SHI, ZQ
    ANDERSON, WA
    THIN SOLID FILMS, 1992, 209 (02) : 230 - 239
  • [20] Evaluation of In2O3 thin film deposited by RF magnetron sputtering
    Yoshioka, Toshihiro
    Ogawa, Junji
    Yuge, Masahiro
    Matsuda, Tokiyoshi
    Kimura, Mutsumi
    2015 IEEE INTERNATIONAL MEETING FOR FUTURE OF ELECTRON DEVICES, KANSAI (IMFEDK), 2015,
12345