The Characteristic of GZO Thin Film Deposited on Flexible Substrates by Using RF Magnetron Sputtering

被引：0
|
作者：
Chen, TaoHsing [1 ]
Chiang, Chia-Ching [1 ]
Chen, Ting-You [1 ]
机构：
[1] Natl Kaohsiung Univ Appl Sci, Dept Mech Engn, Kaohsiung 807, Taiwan
来源：
2014 21ST INTERNATIONAL WORKSHOP ON ACTIVE-MATRIX FLATPANEL DISPLAYS AND DEVICES (AM-FPD) | 2014年
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this study, we investigate the optical and electrical properties of ZnO:Ga (GZO) films on polyimide flexible substrates by using radio frequency magnetron sputtering(RF-sputtering). The structural, electric and optical characteristics of GZO thin films with various deposition parameters were investigated. All films illustrate strong (002) for GZO preferential orientation by using XRD analysis. The results show that the optical transmittance of GZO thin film exhibited an excellent transparency in the visible light field. Moreover, the resistivity of GZO decrease with increasing deposited time,
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页码：199 / 202
页数：4
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