Chemosensors, biosensors, and microsystems based on standard semiconductor technology (CMOS)

Microfabrication techniques and, in particular, complementary metal oxide semiconductor (CMOS) technology have been used to devise chemosensors, biosensors, and microsystems in a generic approach. Examples of micromachined bio/chemosensors, such as cantilevers operated in liquid phase to detect the presence of biomolecules or organic solvents, will be shown. More recent developments aim at electrically interfacing CMOS microelectronic chips with biological entities or electrogenic cells, i.e., cells that react upon electrical stimulation and, in turn, produce electrical signals (heart cells or neurons). A CMOS-based, fully integrated microelectrode array for bidirectional communication (stimulation and recording) with electrogenic cells will be presented. The device is capable of, for example, monitoring the relevant electrophysiological response of in-vitro cells or cell cultures to an electrical stimulus or upon dosing a pharmacological agent with prospective applications in the field of bio-inspired information processing or pharmascreening.