Tungsten-Containing Phases in Diamond-Like Silicon-Carbon Nanocomposites

被引：3

作者：

Popov, A., I ^{[1
,3
]}

Afanas'ev, V. P. ^{[1
]}

Barinov, A. D. ^{[1
,3
]}

Bodisko, Yu N. ^{[1
]}

Gryazev, A. S. ^{[1
]}

Miroshnikova, I. N. ^{[1
,3
]}

Presnyakov, M. Yu ^{[2
]}

Shupegin, M. L. ^{[1
]}

机构：

[1] Natl Res Univ, MPEI, Moscow 111250, Russia

[2] Natl Res Ctr, Kurchatov Inst, Moscow 123182, Russia

[3] Russian Acad Sci, Inst Nanotechnol Microelect, Moscow 119991, Russia

来源：

JOURNAL OF SURFACE INVESTIGATION | 2019年 / 13卷 / 05期

基金：

俄罗斯基础研究基金会;

关键词：

diamond-like silicon-carbon films; nanocomposites; high-resolution transmission electron microscopy; X-ray photoelectron spectroscopy; STABILITY;

D O I：

10.1134/S1027451019050124

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

Using scanning electron microscopy and X-ray photoelectron spectroscopy, we investigate the chemical forms of tungsten incorporated into diamond-like silicon-carbon films. The films are fabricated by simultaneously carrying out the plasmochemical decomposition of a silicon organic precursor and magnetron sputtering of the metal. Films of tungsten-containing diamond-like silicon-carbon nanocomposites are found to contain a considerable amount of the amorphous phase of tungsten oxide, along with nanocrystalline tungsten carbide.

引用

页码：832 / 835

页数：4

共 50 条

[41] Structure and some physicochemical properties of carbon and silicon phases with a LA3 diamond-like lattice
E. A. Belenkov
V. A. Greshnyakov
Journal of Structural Chemistry, 2016, 57 : 884 - 891
[42] Spectroscopic ellipsometry of silicon-containing diamond-like carbon (DLC-Si) films
Kato, Naohiko
Mori, Hiroyuki
Takahashi, Naoko
PHYSICA STATUS SOLIDI C - CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 5, NO 5, 2008, 5 (05): : 1117 - 1120
[43] Structure and some physicochemical properties of carbon and silicon phases with a LA3 diamond-like lattice
Belenkov, E. A.
Greshnyakov, V. A.
JOURNAL OF STRUCTURAL CHEMISTRY, 2016, 57 (05) : 884 - 891
[44] Nitrogen containing diamond-like carbon films as protective and fluorescent layers for silicon solar cells
Litovchenko, VG
Klyui, NI
Kostylyov, VP
Gorbulik, VI
Piryatinskii, YP
OPTO-ELECTRONICS REVIEW, 2000, 8 (04) : 402 - 405
[45] Silicon-carbon nanocomposites: Theoretical investigations
Wang, Y. J.
Zhang, R. Q.
Teo, Boon K.
Frauenheim, Th
JOURNAL OF MOLECULAR STRUCTURE, 2010, 982 (1-3) : 87 - 90
[46] Metal-containing diamond-like carbon-silicon nanocomposite films as temperature sensors
Takeno, T
Takagi, T
Bozhko, A
Shupegin, M
Sato, T
MATERIALS AND DEVICES FOR SMART SYSTEMS, 2004, 785 : 513 - 518
[47] Diamond and diamond-like carbon films
Universitat de Barcelona, Catalunya, Spain
Vacuum, 1-2 (133-139):
[48] Diamond-Like Carbon for Diamond Applications
Schulz-Rheinlaender, R.
JOURNAL OF POLYMER SCIENCE PART A-POLYMER CHEMISTRY, 2008, 46 (21) : A7 - A7
[49] Effect of tungsten on the durability of diamond-like carbon coatings in the chemical industry
Madej, Monika
Marczewska-Boczkowska, Krystyna
Ozimina, Dariusz
PRZEMYSL CHEMICZNY, 2014, 93 (04): : 500 - 505
[50] Diamond and diamond-like carbon MEMS
Luo, J. K.
Fu, Y. Q.
Le, H. R.
Williams, J. A.
Spearing, S. M.
Milne, W. I.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2007, 17 (07) : S147 - S163

← 1 2 3 4 5 →