Tungsten-Containing Phases in Diamond-Like Silicon-Carbon Nanocomposites

被引：3

作者：

Popov, A., I ^{[1
,3
]}

Afanas'ev, V. P. ^{[1
]}

Barinov, A. D. ^{[1
,3
]}

Bodisko, Yu N. ^{[1
]}

Gryazev, A. S. ^{[1
]}

Miroshnikova, I. N. ^{[1
,3
]}

Presnyakov, M. Yu ^{[2
]}

Shupegin, M. L. ^{[1
]}

机构：

[1] Natl Res Univ, MPEI, Moscow 111250, Russia

[2] Natl Res Ctr, Kurchatov Inst, Moscow 123182, Russia

[3] Russian Acad Sci, Inst Nanotechnol Microelect, Moscow 119991, Russia

来源：

JOURNAL OF SURFACE INVESTIGATION | 2019年 / 13卷 / 05期

基金：

俄罗斯基础研究基金会;

关键词：

diamond-like silicon-carbon films; nanocomposites; high-resolution transmission electron microscopy; X-ray photoelectron spectroscopy; STABILITY;

D O I：

10.1134/S1027451019050124

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

Using scanning electron microscopy and X-ray photoelectron spectroscopy, we investigate the chemical forms of tungsten incorporated into diamond-like silicon-carbon films. The films are fabricated by simultaneously carrying out the plasmochemical decomposition of a silicon organic precursor and magnetron sputtering of the metal. Films of tungsten-containing diamond-like silicon-carbon nanocomposites are found to contain a considerable amount of the amorphous phase of tungsten oxide, along with nanocrystalline tungsten carbide.

引用

页码：832 / 835

页数：4

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