Characterization of GaN Schottky barrier photodetectors with a low-temperature GaN cap layer

被引:38
|
作者
Lee, ML
Sheu, JK
Lai, WC
Su, YK
Chang, SJ
Kao, CJ
Tun, CJ
Chen, MG
Chang, WH
Chi, GC
Tsai, JM
机构
[1] Natl Cheng Kung Univ, Inst Microelect, Tainan 70101, Taiwan
[2] Natl Cheng Kung Univ, Dept Elect Engn, Tainan 70101, Taiwan
[3] Natl Cent Univ, Dept Phys, Chungli 320, Taiwan
[4] S Epitaxy Corp, Hsinshi 744, Taiwan
关键词
D O I
10.1063/1.1587890
中图分类号
O59 [应用物理学];
学科分类号
摘要
By using organometallic vapor phase epitaxy we have prepared i-GaN/low temperature (LT) GaN/Ni/Au (sample A) and i-GaN/Ni/Au (sample B) Schottky barrier ultraviolet (UV) photodiodes (PDs). It was found that we could significantly reduce leakage current and achieve a much larger photocurrent to dark current contrast ratio by introducing a LT GaN on top of the conventional nitride-based UV PDs. With an incident light wavelength of 350 nm and a -1 V reverse bias, it was found that the measured responsivity was around 0.1 and 0.37 A/W for samples A and B, respectively. Furthermore, it was found that the operation speed of sample A is slower than that of sample B due to the highly resistive LT GaN layer induced large RC time constant. (C) 2003 American Institute of Physics.
引用
收藏
页码:1753 / 1757
页数:5
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