Formation of sub-wavelength laser induced periodic surface structures by tightly focused femtosecond laser radiation

被引：15

作者：

Wagner, R ^{[1
]}

Gottmann, J ^{[1
]}

Horn, A ^{[1
]}

Kreutz, EW ^{[1
]}

机构：

[1] Rhein Westfal TH Aachen, Lehrstuhl Lasertech, D-52074 Aachen, Germany

来源：

FIFTH INTERNATIONAL SYMPOSIUM ON LASER PRECISION MICROFABRICATION | 2004年 / 5662卷

关键词：

laser induced periodic surface structures (LIPSS); ripples; femtosecond; ultrashort pulsed laser; fused silica; silicon; erbium; barium titanate;

D O I：

10.1117/12.596313

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Sub-wavelength (1/4*lambda-3/4*lambda) laser induced periodic surface structures are generated by irradiation of either bulk fused silica and silicon or Er:BaTiO3 thin films by scanning a tightly focused beam (phi=1mum) of femtosecond laser radiation (lambda=800nm, t(p)= 100fs) on the surface. The ripple pattern extends coherently over many overlapping laser pulses parallel and perpendicular to the polarisation of the laser radiation. The dependence of the ripple spacing on the spacing of successive pulses, the direction of polarisation and the properties of the material is investigated. The evolution of the ripples is investigated by applying pulse bursts with 1-20 pulses. The development conditions of the structures are specified and possible mechanisms of ripple growth are discussed.

引用

页码：168 / 172

页数：5

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