High reflectivity ultraviolet distributed Bragg reflector based on AlGaN/AlGaN multilayer

被引:0
|
作者
Shimada, Ryoko [1 ]
Xie, Jinqiao [1 ]
Morkog, Hadis [1 ]
机构
[1] Virginia Commonwealth Univ, Dept Elect Engn, 601 W Main St, Richmond, VA 23284 USA
来源
关键词
high reflectivity; crack-free; AlGaN; wide band gap semiconductor; distributed Bragg reflectors (DBRs); microcavity;
D O I
10.1117/12.707886
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
AlGaN/AlGaN distributed Bragg reflectors (DBRs) designed for the ultraviolet spectral region have been attained. The crack-free structures were grown on c-plane sapphire by plasma assisted molecular beam epitaxy (NOE). To minimize the built-in strain in DBRs, a thin buffer layer was used directly on e-plane sapphire. A peak reflectivity of 95% at 381 nm with a 21 run stop band width was obtained at room temperature (RT) using a 32.5 pairs Al0.7Ga0.3N/Al0.15Ga0.85N DBR. With a driving force for DBRs and emitting regions in wide band gap semiconductor microcavities, such as those based on GaN and ZnO, is the quest for cavity polariton which is the coupled mode between the exciton and photon modes. Moreover, the exploitation of cavity polaritons could be expected in the course of the development of extremely low-threshold optoelectronics devices.
引用
收藏
页数:8
相关论文
共 50 条
  • [41] Design and fabrication of double AlGaN/GaN distributed Bragg reflector stack mirror for the application of GaN-based optoelectronic devices
    Deng, Gaoqiang
    Zhang, Yuantao
    Li, Pengchong
    Yu, Ye
    Han, Xu
    Chen, Liang
    Yan, Long
    Dong, Xin
    Zhao, Degang
    Du, Guotong
    JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2019, 30 (04) : 3277 - 3282
  • [42] Enhancing the Light-Extraction Efficiency of an AlGaN Nanowire Ultraviolet Light-Emitting Diode by Using Nitride/Air Distributed Bragg Reflector Nanogratings
    Alias, Mohd Sharizal
    Janjua, Bilal
    Zhao, Chao
    Priante, Davide
    Alhamoud, Abdullah A.
    Tangi, Malleswararao
    Alanazi, Lafi M.
    Alatawi, Abdullah A.
    Albadri, Abdulrahman M.
    Alyamani, Ahmed Y.
    Tien Khee Ng
    Ooi, Boon S.
    IEEE PHOTONICS JOURNAL, 2017, 9 (05):
  • [43] High Diffuse Reflectivity of Nanoporous GaN Distributed Bragg Reflector Formed by Electrochemical Etching
    Park, Joonmo
    Kang, Jin-Ho
    Ryu, Sang-Wan
    APPLIED PHYSICS EXPRESS, 2013, 6 (07)
  • [44] Ultraviolet-C AlGaN Resonant-Cavity Light-Emitting Diodes with Thermal Stability Pipe-AlGaN-Distributed Bragg Reflectors
    Chen, Kuei-Ting
    Wang, Cheng-Jie
    Ke, Ying
    Kao, Yu-Cheng
    Chen, Hsiang
    Lin, Yung-Sen
    Han, Jung
    Lin, Chia-Feng
    ACS OMEGA, 2023, 8 (03): : 3478 - 3483
  • [45] AlGaN-based 330 nm resonant-cavity-enhanced p-i-n junction ultraviolet photodetectors using AlN/AlGaN distributed Bragg reflectors
    Xie, Zili
    Liu, Bin
    Nie, Chao
    Jiang, Ruolian
    Ji, Xiaoli
    Zhao, Hong
    Han, Ping
    Xiu, Xiangqian
    Zhang, Rong
    Zheng, Youdou
    Gong, Haimei
    PHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 7, NO 7-8, 2010, 7 (7-8):
  • [46] Enhanced Output Power of Near-Ultraviolet InGaN/AlGaN LEDs With Patterned Distributed Bragg Reflectors
    Lin, Wen-Yu
    Wuu, Dong-Sing
    Huang, Shih-Cheng
    Horng, Ray-Hua
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 2011, 58 (01) : 173 - 179
  • [47] InGaN/AlGaN Ultraviolet Light-Emitting Diode with a Ti3O5/Al2O3 Distributed Bragg Reflector
    Jeong, Tak
    Lee, Hyun Haeng
    Park, Si-Hyun
    Baek, Jong Hyeob
    Lee, June Key
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2008, 47 (12) : 8811 - 8814
  • [48] Enhanced Light Extraction in AlInGaN UV Light-Emitting Diodes by an Embedded AlN/AlGaN Distributed Bragg Reflector
    Liu Hui
    Zhao Heng
    Hou Jin
    Liu Dan
    Gao Yi-Hua
    CHINESE PHYSICS LETTERS, 2012, 29 (10)
  • [49] Investigation of AlGaN-based deep-ultraviolet light-emitting diodes with composition-varying AlGaN multilayer barriers
    Yin, Yi An
    Wang, Naiyin
    Fan, Guanghan
    Zhang, Yong
    SUPERLATTICES AND MICROSTRUCTURES, 2014, 76 : 149 - 155
  • [50] AlGaN-based multi-type distributed Bragg reflectors grown by MOCVD
    Jiangsu Provincial Key Laboratory of Advanced Photonic and Electronic Materials, Department of Physics, Nanjing University, Nanjing 210093, China
    不详
    不详
    Pan Tao Ti Hsueh Pao, 2007, SUPPL. (492-495): : 492 - 495