Synchrotron studies of top-down grown silicon nanowires

被引:4
|
作者
Turishchev, S. Yu. [1 ]
Parinova, E. V. [1 ]
Nesterov, D. N. [1 ]
Koyuda, D. A. [1 ]
Sivakov, V. [2 ]
Schleusener, A. [2 ]
Terekhov, V. A. [1 ]
机构
[1] Voronezh State Univ, Univ Skaya Pl 1, Voronezh 394018, Russia
[2] Leibniz Inst Photon Technol, Albert Einstein Str 9, D-07745 Jena, Germany
基金
俄罗斯科学基金会;
关键词
Silicon nanowires; Scanning electron microscopy; Synchrotron radiation; X-ray absorption near edge structure; Composition; ABSORPTION-SPECTROSCOPY; POROUS SILICON; ELECTRON; NANOCRYSTALS; FABRICATION; MATRIX; WAFERS; ARRAYS; DEVICE;
D O I
10.1016/j.rinp.2018.04.071
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Morphology of the top-down grown silicon nanowires obtained by metal-assisted wet-chemical approach on silicon substrates with different resistance were studied by scanning electron microscopy. Obtained arrays of compact grown Si nanowires were a subject for the high resolution electronic structures studies by X-ray absorption near edge structure technique performed with the usage of high intensity synchrotron radiation of the SRC storage ring of the University of Wisconsin-Madison. The different oxidation rates were found by investigation of silicon atoms local surrounding specificity of the highly developed surface and near surface layer that is not exceeded 70 nm. Flexibility of the wires arrays surface morphology and its composition is demonstrated allowing smoothly form necessary surface oxidation rate and using Si nanowires as a useful matrixes for a wide range of further functionalization.
引用
收藏
页码:1494 / 1496
页数:3
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