Pt/GaN Schottky Diodes for Highly Sensitive Hydrogen Sulfide Detection

被引:4
|
作者
Xiao, Jian-Feng [1 ]
Hsu, Chen-Pin [1 ]
Sarangadharan, Indu [1 ]
Lee, Geng-Yen [2 ]
Chyi, Jen-Inn [2 ]
Wang, Yu-Lin [1 ]
机构
[1] Natl Tsing Hua Univ, Inst Nanoengn & Microsyst, Hsinchu 300, Taiwan
[2] Natl Cent Univ, Dept Elect Engn, Jhongli 32001, Taoyuan County, Taiwan
关键词
GAS SENSORS; THIN-FILMS; H2S; TEMPERATURE; OXIDE; IMPROVEMENT; MOO3;
D O I
10.1149/2.0311605jss
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Pt/GaN Schottky diodes were fabricated for detecting hydrogen sulfide at 200 degrees C. Ga-face GaN was grown on c-plane sapphire substrate by a metal-organic chemical vapor deposition (MOCVD) system. Hydrogen sulfide was mixed with nitrogen and detected from 0.1 similar to 10 ppm with the Pt/GaN Schottky diodes. Hydrogen sulfide caused the current increase in both forward and reversed bias of the Schottky diode. Real-time detection of the hydrogen sulfide was conducted at a forward bias 1.18 V in nitrogen ambient. The sensors show good linear dependence of the current change at forward bias versus the H2S gas concentration. The sensitivity in the two ranges from 0.1 similar to 1 ppm and 1 similar to 10 ppm of hydrogen sulfide, are 14.62 and 5.844 mu A/ppm, respectively. The detection limit of the sensor is around 0.2 ppm of hydrogen sulfide at the forward bias at 200 degrees C. The results show that the Pt/GaN Schottky diodes are promising for low cost and high sensitivity hydrogen sulfide detection. (C) The Author(s) 2016. Published by ECS. All rights reserved.
引用
收藏
页码:Q137 / Q139
页数:3
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