Thermoelectric energy harvester fabricated by Stepper

被引：13

作者：

Su, J. ^{[1
]}

Vullers, Ruud J. M. ^{[1
]}

Goedbloed, M. ^{[1
]}

van Andel, Y. ^{[1
]}

Leonov, V. ^{[2
]}

Wang, Z. ^{[2
,3
]}

机构：

[1] IMEC, Holst Ctr, NL-5656 AE Eindhoven, Netherlands

[2] IMEC, B-3001 Louvain, Belgium

[3] Katholieke Univ Leuven, Louvain, Belgium

来源：

MICROELECTRONIC ENGINEERING | 2010年 / 87卷 / 5-8期

关键词：

Thermal energy harvester; Stepper; Large topography; Thermocouples; Micro-machining; MEMS;

D O I：

10.1016/j.mee.2009.11.135

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, a micromachined thermoelectric energy harvester with 61,mu m high thermocouples is fabricated by Stepper technology. Micromachined thermocouples are considered a cost-effective breakthrough solution for energy harvesters working at low thermal gradients and weak heat flows, typical for e.g. human body as well as machine-related waste heat. The thermoelectric generators will be used for autonomous wireless sensor nodes in a body area Network. (C) 2009 Elsevier B.V. All rights reserved.

引用

页码：1242 / 1244

页数：3

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