Thermoelectric energy harvester fabricated by Stepper

被引：13
|
作者：
Su, J. [1 ]
Vullers, Ruud J. M. [1 ]
Goedbloed, M. [1 ]
van Andel, Y. [1 ]
Leonov, V. [2 ]
Wang, Z. [2 ,3 ]
机构：
[1] IMEC, Holst Ctr, NL-5656 AE Eindhoven, Netherlands
[2] IMEC, B-3001 Louvain, Belgium
[3] Katholieke Univ Leuven, Louvain, Belgium
来源：
MICROELECTRONIC ENGINEERING | 2010年 / 87卷 / 5-8期
关键词：
Thermal energy harvester; Stepper; Large topography; Thermocouples; Micro-machining; MEMS;
D O I：
10.1016/j.mee.2009.11.135
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper, a micromachined thermoelectric energy harvester with 61,mu m high thermocouples is fabricated by Stepper technology. Micromachined thermocouples are considered a cost-effective breakthrough solution for energy harvesters working at low thermal gradients and weak heat flows, typical for e.g. human body as well as machine-related waste heat. The thermoelectric generators will be used for autonomous wireless sensor nodes in a body area Network. (C) 2009 Elsevier B.V. All rights reserved.
引用
收藏
页码：1242 / 1244
页数：3
相关论文
共 50 条
  • [21] Structural Design for Dimensional Stability of Thermocouples in Thermoelectric Energy Harvester
    Chen, M. D.
    Wang, J. Y.
    Yang, S. M.
    Tsai, M. H.
    IEEE SENSORS JOURNAL, 2019, 19 (01) : 58 - 64
  • [22] Design of Quantum Well Thermoelectric Energy Harvester by CMOS Process
    Yang, S. M.
    Sheu, G. J.
    2013 13TH IEEE CONFERENCE ON NANOTECHNOLOGY (IEEE-NANO), 2013, : 496 - 500
  • [23] A Thermoelectric Energy Harvester Based on Microstructured Quasicrystalline Solar Absorber
    Oliveira, Vinicius Silva
    Camboim, Marcelo Miranda
    de Souza, Cleonilson Protasio
    Silva Guedes de Lima, Bruno Alessandro
    Baiocchi, Orlando
    Kim, Hee-Seok
    MICROMACHINES, 2021, 12 (04)
  • [24] Design and Implementation of a Thermoelectric Energy Harvester with MPPT Algorithms and Supercapacitor
    Vega, Jean
    Lezama, Jinmi
    IEEE LATIN AMERICA TRANSACTIONS, 2021, 19 (01) : 163 - 170
  • [25] Development of Vibration Energy Harvester Fabricated by Rapid Prototyping Technology
    Rubes, Ondrej
    Smilek, Jan
    Hadas, Zdenek
    PROCEEDINGS OF THE 2014 16TH INTERNATIONAL CONFERENCE ON MECHATRONICS (MECHATRONIKA 2014), 2014, : 178 - 182
  • [26] Analysis Of Energy Harvester Circuit for A Thermoelectric Energy Harvesting System (TEHs) At Asphalt Pavement
    Zulkifli, Anis Najibah
    Khamil, Khairun Nisa
    Yusop, Azdiana Md
    Isa, Ahmad Nizam
    PRZEGLAD ELEKTROTECHNICZNY, 2023, 99 (10): : 60 - 66
  • [27] Energy analysis of a geothermal power plant with thermoelectric energy harvester using waste heat
    Hekim, Mahmut
    Cetin, Engin
    INTERNATIONAL JOURNAL OF ENERGY RESEARCH, 2021, 45 (15) : 20891 - 20908
  • [28] Energy storage options for wireless sensors powered by aircraft specific thermoelectric energy harvester
    K. Thangaraj
    A. Elefsiniots
    Th. Becker
    U. Schmid
    J. Lees
    C. A. Featherston
    R. Pullin
    Microsystem Technologies, 2014, 20 : 701 - 707
  • [29] Energy storage options for wireless sensors powered by aircraft specific thermoelectric energy harvester
    Thangaraj, K.
    Elefsiniots, A.
    Becker, Th.
    Schmid, U.
    Lees, J.
    Featherston, C. A.
    Pullin, R.
    MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2014, 20 (4-5): : 701 - 707
  • [30] Extraction of Temperature Dependent Parameters for an Electrothermal Model of Thermoelectric Energy Harvester
    Dziurdzia, Piotr
    Bratek, Piotr
    Brzozowski, Ireneusz
    Gelmuda, Wojciech
    Ostrowski, Jacek
    Kos, Andrzej
    PROCEEDINGS OF THE 23RD INTERNATIONAL CONFERENCE ON MIXED DESIGN OF INTEGRATED CIRCUITS AND SYSTEMS (MIXDES 2016), 2016, : 377 - 381
12345