Thermoelectric energy harvester fabricated by Stepper

被引：13
|
作者：
Su, J. [1 ]
Vullers, Ruud J. M. [1 ]
Goedbloed, M. [1 ]
van Andel, Y. [1 ]
Leonov, V. [2 ]
Wang, Z. [2 ,3 ]
机构：
[1] IMEC, Holst Ctr, NL-5656 AE Eindhoven, Netherlands
[2] IMEC, B-3001 Louvain, Belgium
[3] Katholieke Univ Leuven, Louvain, Belgium
来源：
MICROELECTRONIC ENGINEERING | 2010年 / 87卷 / 5-8期
关键词：
Thermal energy harvester; Stepper; Large topography; Thermocouples; Micro-machining; MEMS;
D O I：
10.1016/j.mee.2009.11.135
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper, a micromachined thermoelectric energy harvester with 61,mu m high thermocouples is fabricated by Stepper technology. Micromachined thermocouples are considered a cost-effective breakthrough solution for energy harvesters working at low thermal gradients and weak heat flows, typical for e.g. human body as well as machine-related waste heat. The thermoelectric generators will be used for autonomous wireless sensor nodes in a body area Network. (C) 2009 Elsevier B.V. All rights reserved.
引用
收藏
页码：1242 / 1244
页数：3
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