IN-SITU OVENIZATION OF LAME-MODE SILICON RESONATORS FOR TEMPERATURE COMPENSATION

被引：0
|
作者：
Chen, Yunhan [1 ]
Ng, Eldwin J. [1 ]
Yang, Yushi [1 ]
Ahn, Chae Hyuck [1 ]
Flader, Ian [1 ]
Kenny, Thomas W. [1 ]
机构：
[1] Stanford Univ, Stanford, CA 94305 USA
来源：
2015 28TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2015) | 2015年
关键词：
MICROMECHANICAL RESONATORS;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper reports an inside-encapsulation ovenization method for the temperature compensation of Lame-mode epi-sealed silicon resonators. With this method, the square Lame-mode resonator itself acts both as a thermometer and a heater, which allows for simultaneous in situ sensing and control of the operating temperature. In this device, only the resonating element is heated, reducing the power consumption and the thermal time constant, relative to approaches which control the temperature of an entire MEMS chip or system. Preliminary results of real-time frequency compensation achieve a frequency stability of similar to 5ppm over -40 similar to+80 degrees C without the need for sophisticated control schemes.
引用
下载
收藏
页码：809 / 812
页数：4
相关论文
共 50 条
  • [21] DISTRIBUTED LAME MODE RESONATORS FOR TEMPERATURE-STABLE HIGH FREQUENCY MEMS OSCILLATORS
    Daruwalla, Anosh
    Liu, Chang-Shun
    Wen, Haoran
    Ayazi, Farrokh
    30TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2017), 2017, : 909 - 912
  • [22] Lateral Diffusion Doping of Silicon for Temperature Compensation of MEMS Resonators
    Shin, Dongsuk D.
    Heinz, David B.
    Kwon, Hyun-Keun
    Chen, Yunhan
    Kenny, Thomas W.
    2018 5TH IEEE INTERNATIONAL SYMPOSIUM ON INERTIAL SENSORS & SYSTEMS (INERTIAL 2018), 2018, : 125 - 128
  • [23] Temperature Compensation of Silicon Micromechanical Resonators via Degenerate Doping
    Samarao, Ashwin K.
    Ayazi, Farrokh
    2009 IEEE INTERNATIONAL ELECTRON DEVICES MEETING, 2009, : 737 - 740
  • [24] Utilizing the Intrinsic Mode of Weakly Coupled Resonators for Temperature Compensation
    Wang, Kunfeng
    Xiong, Xingyin
    Wang, Zheng
    Cai, Pengcheng
    Ma, Liangbo
    Zou, Xudong
    MICROMACHINES, 2022, 13 (09)
  • [25] Temperature Dependence Modeling and Thermal Sensitivity Reduction of Bulk Micromachined Silicon MEMS Lame Resonators
    Kolahdouz-Moghaddam, Amir-Reza
    Nabavi, Seyedfakhreddin
    Nabki, Frederic
    JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2023, 32 (04) : 314 - 326
  • [26] TEMPERATURE COMPENSATION USING AN IN-SITU GAP-BASED TEMPERATURE SENSOR
    Liu, Xintian
    Xie, Qianyi
    Ozgurluk, Alper
    Jin, Qiutong
    Nguyen, Clark T. -C.
    2024 IEEE 37TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS, 2024, : 144 - 147
  • [27] TEMPERATURE COMPENSATION IN SILICON-BASED MICRO-ELECTROMECHANICAL RESONATORS
    Schoen, F.
    Nawaz, M.
    Bever, T.
    Gruenberger, R.
    Raberg, W.
    Weber, W.
    Winkler, B.
    Weigel, R.
    IEEE 22ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2009), 2009, : 884 - 887
  • [28] A Technique of In-situ Annealing and Temperature Monitoring for Silicon Photomultipliers
    Liu, Hongmin
    Peng, Yu
    Long, Jinyan
    Lv, Wenxing
    Liang, Kun
    Yang, Ru
    Han, Dejun
    2019 IEEE NUCLEAR SCIENCE SYMPOSIUM AND MEDICAL IMAGING CONFERENCE (NSS/MIC), 2019,
  • [29] Exploring the Limits and Practicality of Q-based Temperature Compensation for Silicon Resonators
    Salvia, J.
    Messana, M.
    Ohline, M.
    Hopcroft, M. A.
    Melamud, R.
    Chandorkar, S.
    Lee, H. K.
    Bahl, G.
    Murmann, B.
    Kenny, T. W.
    IEEE INTERNATIONAL ELECTRON DEVICES MEETING 2008, TECHNICAL DIGEST, 2008, : 671 - +
  • [30] Compensation of temperature effects for in-situ soil moisture measurement by DPHP sensors
    Palaparthy, Vinay S.
    Singh, Devendra N.
    Baghini, Maryam Shojaei
    COMPUTERS AND ELECTRONICS IN AGRICULTURE, 2017, 141 : 73 - 80
12345