Parasitic p-n junctions formed at V-pit defects in p-GaN

被引:2
|
作者
Vergeles, P. S. [1 ]
Yakimov, E. B. [1 ,2 ,3 ]
Polyakov, A. Y. [2 ,3 ]
Shchemerov, I. V. [1 ]
Chernykh, A. V. [1 ]
Vasilev, A. A. [1 ]
Kochkova, A. I. [1 ]
Lee, In-Hwan [4 ]
Pearton, Stephen J. [5 ]
机构
[1] Inst Microelect Technol RAS, Chernogolovka 142432, Russia
[2] Natl Univ Sci & Technol MISiS, Sch Adv Mat Engn, Moscow 119049, Russia
[3] Natl Univ Sci & Technol MISiS, Res Ctr Adv Mat Dev, Moscow 119049, Russia
[4] Korea Univ, Dept Mat Sci & Engn, Anamro 145, Seoul 02841, South Korea
[5] Univ Florida, Dept Mat Sci & Engn, Gainesville, FL 32611 USA
关键词
DIFFUSION LENGTH; DEEP TRAPS; DISLOCATIONS; LUMINESCENCE; TEMPERATURE;
D O I
10.1063/5.0047742
中图分类号
O59 [应用物理学];
学科分类号
摘要
The luminescent and recombination properties of V-pit defects in p-GaN(Mg) grown by metalorganic chemical vapor deposition (MOCVD) were studied by scanning electron microscopy (SEM) in the secondary electron, cathodoluminescence (CL), and electron beam induced current (EBIC) modes, combined with CL spectra measurements and EBIC collection efficiency measurements. Similar studies were performed on low-dislocation-density freestanding n-GaN crystals. For MOCVD p-GaN films, the SEM investigations were supplemented by capacitance-voltage, current-voltage, deep level transient spectroscopy analysis with Ni Schottky diode, and Ohmic contacts. These experiments show that V-pits in p-GaN increase the leakage current of Schottky diodes, as in n-GaN films and crystals. EBIC imaging and EBIC collection efficiency results suggest that in the region of V-pits, a parasitic p-n junction is formed. We also observe that, in V-pits, the CL spectra the contribution of the 3.2eV defect band is strongly enhanced compared to the 3eV blue CL band that dominates the spectra.
引用
收藏
页数:7
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