Conductivity and surface potential studies in carbon films by conductive scanning probe microscopy

被引：6

作者：

Zhang, L ^{[1
]}

Sakai, T ^{[1
]}

Sakuma, N ^{[1
]}

Ono, T ^{[1
]}

机构：

[1] Toshiba Corp, Adv Discrete Semicond Technol Lab, Ctr Corp Res & Dev, Saiwai Ku, Kawasaki, Kanagawa 2128582, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2000年 / 39卷 / 6B期

关键词：

conductive SPM; field emission; carbon films; AFM; KFM; surface potential; work function;

D O I：

10.1143/JJAP.39.3728

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Conductive scanning probe microscopy (SPM) was applied to field-emission carbon films. The microstructures, conductivity and surface potential properties of carbon films were investigated by conductive atomic force microscopy (AFM) and Kelvin probe force microscopy (KFM), as well as a combination of the two techniques. SPM was proven to be very effective for the study of materials with multiple phases and complex structures, and in clarifying the low-field-emission mechanism.

引用

页码：3728 / 3731

页数：4

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