Conductivity and surface potential studies in carbon films by conductive scanning probe microscopy

被引：6
|
作者：
Zhang, L [1 ]
Sakai, T [1 ]
Sakuma, N [1 ]
Ono, T [1 ]
机构：
[1] Toshiba Corp, Adv Discrete Semicond Technol Lab, Ctr Corp Res & Dev, Saiwai Ku, Kawasaki, Kanagawa 2128582, Japan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2000年 / 39卷 / 6B期
关键词：
conductive SPM; field emission; carbon films; AFM; KFM; surface potential; work function;
D O I：
10.1143/JJAP.39.3728
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Conductive scanning probe microscopy (SPM) was applied to field-emission carbon films. The microstructures, conductivity and surface potential properties of carbon films were investigated by conductive atomic force microscopy (AFM) and Kelvin probe force microscopy (KFM), as well as a combination of the two techniques. SPM was proven to be very effective for the study of materials with multiple phases and complex structures, and in clarifying the low-field-emission mechanism.
引用
收藏
页码：3728 / 3731
页数：4
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