A combination study of conductivity and contact potential in low-field-emission carbon film by conductive scanning probe microscopy

被引:0
|
作者
Zhang, L [1 ]
Sakai, T [1 ]
Sakuma, N [1 ]
Ono, T [1 ]
Nakayama, K [1 ]
机构
[1] Toshiba Corp, Adv Discrete Semicond Technol Lab, Saiwai Ku, Kawasaki, Kanagawa 2108582, Japan
来源
关键词
conductive AFM/KFM/SPM; conductivity; contact potential difference; electron field emission; carbon film;
D O I
暂无
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Simultaneous measurements of surface topography of and nanoscale conductivity/potential distributions in low-field-emission carbon films were performed by conductive scanning probe microscopy (SPM). The films were produced by bias-enhanced nucleation (BEN) hot filament (HF) chemical vapor deposition (CVD). A turn-on field of as low as 1 V/mu m was obtained by field-emission measurements. Simultaneous topography-current maps were obtained by bias-applied conductive atomic force microscopy (AFM) in the contact mode and showed that highly conducting sites and dielectric regions of the micro- and/or nanometer order coexisted. Furthermore, in situ I-V characteristics of both regions showed that the conducting sites have a metallic ohmic property, whereas the dielectric regions have a degenerated Schottky property, which represents a semiconductor band structure. Contact potential differences (CPD) were measured as surface potential (V-CPD) images of one and the same area were obtained, which made it possible to evaluate the work function of the conducting sites. It is shown that the conducting sites have a work function of about 5.0 eV, which most likely indicates the graphite phase. It is revealed that randomly distributed conducting channels play an important role in the low-field-emission process. It is also suggested that simultaneous measurements of topography and conductivity/contact potential and the combination of the two are effective methods for investigating nanostructural surfaces.
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页码:53 / 61
页数:9
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