Temperature-Programmed Gas-Sensing With Microhotplates: an Opportunity to Enhance Microelectronic Gas Sensor Metrology

被引：0
|
作者：
Geist, Jon [1 ]
Afridi, Muhammad [1 ]
机构：
[1] NIST, Div Semicond Elect, Gaithersburg, MD 20878 USA
来源：
FRONTIERS OF CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2009 | 2009年 / 1173卷
关键词：
MEMS; Microhotplate; Gas sensor; Temperature programming; More than Moore; Heterogeneous integration; Functional diversification;
D O I：
暂无
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
It is only recently that the ITRS (International Technical Roadmap for Semiconductors) has identified functional diversification through heterogeneous integration as a key enabler of future industry growth. This paper describes a powerful temperature-programmed gas-sensing technique that has the potential to convert low-cost, integrated, microhotplate-based non-selective, metal-oxide gas sensors into stable, sensitive, and highly selective gas-sensor systems. The paper also points out the importance of heterogeneous integration and temperature sensor stability to support this measurement technique.
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页码：207 / 211
页数：5
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