Temperature-Programmed Gas-Sensing With Microhotplates: an Opportunity to Enhance Microelectronic Gas Sensor Metrology

It is only recently that the ITRS (International Technical Roadmap for Semiconductors) has identified functional diversification through heterogeneous integration as a key enabler of future industry growth. This paper describes a powerful temperature-programmed gas-sensing technique that has the potential to convert low-cost, integrated, microhotplate-based non-selective, metal-oxide gas sensors into stable, sensitive, and highly selective gas-sensor systems. The paper also points out the importance of heterogeneous integration and temperature sensor stability to support this measurement technique.