Effects of indium surfactant on optical and structural properties of MBE grown GaN

被引:4
|
作者
Fong, WK [1 ]
Zhu, CF [1 ]
Surya, C [1 ]
Leung, BH [1 ]
Cheng, CC [1 ]
Sundaravel, B [1 ]
Luo, EZ [1 ]
Xu, JB [1 ]
Wilson, IH [1 ]
机构
[1] Hong Kong Polytech Univ, Dept Elect & Informat Engn, Hong Kong, Hong Kong, Peoples R China
来源
关键词
D O I
10.1117/12.392186
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A small indium flux was used as a surfactant during the growth of gallium nitride films by rf-plasma assisted molecular beam epitaxy. The effects of the indium surfactant on the optical and structural properties of undoped GaN were studied by photoluminescence spectroscopy, high-resolution X-ray diffraction, atomic force microscopy, Rutherford backscattering spectroscopy, and low-frequency noise. Photoluminescence spectra show that GaN thin films grown in the presence of In surfactant exhibit suppressed yellow luminescence compared to films grown under the same experimental conditions but without In surfactant. The X-ray rocking curves demonstrate a 20% decrease in the full width at half maximum value for the films grown with In surfactant. AFM studies show that the root mean squared roughness for films grown with and without In surfactant are 5.86 and 6.99 nm respectively, indicating significant improvement in surface morphology. RES and ion channeling shows the presence of stacking faults and dislocations in GaN grown with In surfactant and stacking faults in GaN grown without In. For the characterization of defect properties in the films we conducted detailed studies of l/f and Generation-Recombination (C-R) noise on our samples. About 65% reduction in the Hooge parameter was observed in the Film grown with In surfactant, indicative of a corresponding reduction in defect states within the material. For f > 500 Hz, G-R noise was the dominating fluctuation process. Detailed characterization of the G-R noise over a wide range of temperatures enabled the determination of the energy levels of the traps responsible for the G-R noise. Three different trap levels were observed using noise measurement technique. For films grown without In surfactant, traps with activation energies 806 meV, 241 meV and 100 meV were observed, whereas for samples grown with In surfactant traps were observed at 666 meV, 208 meV and 90 meV. Such systematic reduction in the energy levels of the traps may arise from the relaxation of strains in the material when grown under the application of In surfactant.
引用
收藏
页码:44 / 57
页数:14
相关论文
共 50 条
  • [21] Microstructure and optical properties of GaN films grown on porous SiC substrate by MBE
    Yun, F
    Reshchikov, MA
    He, L
    King, T
    Huang, D
    Morkoç, H
    Inoki, CK
    Kuan, TS
    DEFECT AND IMPURITY ENGINEERED SEMICONDUCTORS AND DEVICES III, 2002, 719 : 17 - 22
  • [22] Defect related optical and electrical properties of MBE grown cubic GaN epilayers
    As, DJ
    RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1998, 146 (1-4): : 145 - 160
  • [23] Optical and electrical properties of semi-insulating GaN:C grown by MBE
    Armitage, R
    Yang, Q
    Feick, H
    Tzeng, SY
    Lim, J
    Weber, ER
    GAN AND RELATED ALLOYS-2002, 2003, 743 : 603 - 608
  • [24] Defect related optical and electrical properties of MBE grown cubic GaN epilayers
    Univsitaet Paderborn, Paderborn, Germany
    Radiat Eff Defects Solids, 1 -4 pt 1 (145-160):
  • [25] Effects of in situ annealing on optical and structural properties of GaN epilayers grown by HVPE
    Duan, Chenghong
    Qiu, Kai
    Li, Xinhua
    Zhong, Fei
    Yin, Zhijun
    Han, Qifeng
    Wang, Yuqi
    Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors, 2008, 29 (03): : 410 - 413
  • [26] Properties of homoepitaxially MBE-grown GaN
    Suski, T
    Krueger, J
    Kisielowski, C
    Phatak, P
    Leung, MSH
    LilientalWeber, Z
    Gassmann, A
    Newman, N
    Rubin, MD
    Weber, ER
    Grzegory, I
    Jun, J
    Bockowski, M
    Porowski, S
    Helava, HI
    III-NITRIDE, SIC AND DIAMOND MATERIALS FOR ELECTRONIC DEVICES, 1996, 423 : 329 - 334
  • [27] Structural and optical properties of AlGaInN/GaN grown by MOVPE
    Kobayashi, Y
    Yamauchi, Y
    Kobayashi, NK
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2003, 42 (4B): : 2300 - 2304
  • [28] Optical Characterization of GaN Grown by Plasma Source MBE
    ZHANG Yong-gang
    Semiconductor Photonics and Technology, 2000, (01) : 23 - 28
  • [29] Optical emission bands in cubic GaN grown by MBE
    Goldys, E.M.
    Godlewski, M.
    Drozdowicz-Tomsia, K.
    Langer, R.
    Barski, A.
    Conference on Optoelectronic and Microelectronic Materials and Devices, Proceedings, COMMAD, 1998, : 202 - 205
  • [30] Structural and electrical properties of AlGaN/GaN HEMTs grown by MBE on SiC, Si(111) and GaN templates
    Cordier, Y
    Hugues, M
    Semond, F
    Natali, F
    Lorenzini, P
    Bougrioua, Z
    Massies, J
    Frayssinet, E
    Beaumont, B
    Gibart, P
    Faurie, JP
    JOURNAL OF CRYSTAL GROWTH, 2005, 278 (1-4) : 383 - 386