AFM study of ridges in few-layer epitaxial graphene grown on the carbon-face of 4H-SiC(000(1)over-bar)

被引:76
|
作者
Prakash, Gyan [1 ,2 ]
Capano, Michael A. [2 ,3 ]
Bolen, Michael L. [2 ,3 ]
Zemlyanou, Dmitry [2 ]
Reifenberger, Ronald G. [1 ,2 ]
机构
[1] Purdue Univ, Dept Phys, W Lafayette, IN 47907 USA
[2] Purdue Univ, Birck Nanotechnol Ctr, W Lafayette, IN 47907 USA
[3] Purdue Univ, Sch Elect Engn, W Lafayette, IN 47907 USA
关键词
THERMAL-EXPANSION; GRAPHITE; GRAPHITIZATION; 6H-SIC(0001); TEMPERATURE; MEMBRANES; DYNAMICS; PHASE;
D O I
10.1016/j.carbon.2010.02.026
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
A characterization of the graphitic overlayer that forms on 4H-SiC(000 (1) over bar) substrates heated for ten minutes to temperatures T > 1350 degrees C under vacuum conditions has been performed. X-ray photoelectron spectroscopy of the C-face reveals the presence of graphitic carbon with a thickness that increases with growth temperature. Parallel atomic force microscope (AFM) studies find a mesh-like network of ridges with high curvature that bound atomically flat, tile-like facets of few-layer graphene (FLG). By imaging the network that develops on FLG, it is possible to map out the regions where the elastic energy is concentrated. (C) 2010 Elsevier Ltd. All rights reserved.
引用
收藏
页码:2383 / 2393
页数:11
相关论文
共 50 条
  • [41] Spin transport in epitaxial graphene on the C-terminated (000(1)over-bar)-face of silicon carbide
    van den Berg, J. J.
    Yakimova, R.
    van Wees, B. J.
    APPLIED PHYSICS LETTERS, 2016, 109 (01)
  • [42] Raman analysis of epitaxial graphene on 6H-SiC (000(1)over-bar) substrates under low pressure environment
    Wang Dangchao
    Zhang Yuming
    Zhang Yimen
    Lei Tianmin
    Guo Hui
    Wang Yuehu
    Tang Xiaoyan
    Wang Hang
    JOURNAL OF SEMICONDUCTORS, 2011, 32 (11)
  • [43] Fast epitaxial growth of high-purity 4H-SiC(000(1)over-bar) in a vertical hot-wall chemical vapor deposition
    Danno, K
    Kimoto, T
    Asano, K
    Sugawara, Y
    Matsunami, H
    JOURNAL OF ELECTRONIC MATERIALS, 2005, 34 (04) : 324 - 329
  • [44] High-temperature graphitization of the 6H-SiC (000(1)over-bar) face
    Forbeaux, I
    Themlin, JM
    Debever, JM
    SURFACE SCIENCE, 1999, 442 (01) : 9 - 18
  • [45] Few-layer epitaxial graphene grown on vicinal 6H-SiC studied by deep ultraviolet Raman spectroscopy
    Kisoda, Kenji
    Kamoi, Susumu
    Hasuike, Noriyuki
    Harima, Hiroshi
    Morita, Kouhei
    Tanaka, Satoru
    Hashimoto, Akihiro
    APPLIED PHYSICS LETTERS, 2010, 97 (03)
  • [46] Mode-locked Fiber Laser with Few-Layer Epitaxial Graphene Grown on 6H-SiC Substrates
    Liu, Jiang
    Wei, Rusheng
    Xu, Xiangang
    Wang, Pu
    2011 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO), 2011,
  • [47] Slow response in gate current-voltage characteristics of metal-oxide-semiconductor structures on the 4H-SiC(000(1)over-bar) face
    Kumagai, Naoki
    Kimura, Hiroshi
    Onishi, Yasuhiko
    Okamoto, Mitsuo
    Fukuda, Kenji
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2016, 55 (05)
  • [49] Chemical vapor deposition condition dependence of reconstructed surfaces on 4H-SiC (0001), (000(1)over-bar), and (1(1)over-bar00) surfaces
    Chokawa, Kenta
    Makino, Emi
    Hosokawa, Norikazu
    Onda, Shoichi
    Kangawa, Yoshihiro
    Shiraishi, Kenji
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2019, 58 (11)
  • [50] Epitaxial growth of 4H-SiC(0 3 (3)over-bar 8) and control of MOS interface
    Kimoto, T
    Hirao, T
    Fujihira, K
    Kosugi, H
    Danno, K
    Matsunami, H
    APPLIED SURFACE SCIENCE, 2003, 216 (1-4) : 497 - 501