A sub-μW micromachined magnetic compass

被引:0
|
作者
Leïchlé, TC [1 ]
Ye, WJ [1 ]
Allen, MG [1 ]
机构
[1] Georgia Inst Technol, Sch Elect & Comp Engn, Atlanta, GA 30332 USA
来源
MEMS-03: IEEE THE SIXTEENTH ANNUAL INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS | 2003年
关键词
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A low-power micromachined magnetic compass has been designed, fabricated and tested. Sensing of the external magnetic field is achieved by incorporating a permanent magnet into a micro mechanical resonator. The shift of the fundamental resonant frequency of the device is used to determine the amplitude or the direction of the external field. The resonator fabrication follows a CMOS-compatible, low temperature process, mainly based on surface micromachining of polymer layers. The fabricated device has been successfully demonstrated as an electronic compass, exhibiting a resolution of 45 degrees at 30muT, for a 10V resonator excitation voltage. The power consumed by the resonator is on the order of 20nW. A theoretical model of the device was developed using vibration analysis and nonlinear deflection theory. Good agreement was observed between the predicted and observed behavior of the magnetic field sensor.
引用
收藏
页码:514 / 517
页数:4
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