Investigation of a large power water-cooled microwave resonance window for application with the ECR ion source

被引：0
|
作者：
Guo, Guo [1 ]
Guo, Junwei [2 ]
Niu, Xinjian [1 ]
Liu, Yinghui [1 ]
Wang, Hui [1 ]
Wei, Yanyu [1 ]
机构：
[1] Univ Elect Sci & Technol China, Sch Phys Elect, Natl Key Lab Sci & Technol Vacuum Elect, Chengdu 610054, Peoples R China
[2] Chinese Acad Sci, Inst Modern Phys, Lanzhou 730000, Peoples R China
来源：
PHYSICS OF PLASMAS | 2017年 / 24卷 / 06期
基金：
中国国家自然科学基金;
关键词：
D O I：
10.1063/1.4986073
中图分类号：
O35 [流体力学]; O53 [等离子体物理学];
学科分类号：
070204 ; 080103 ; 080704 ;
摘要：
A large power water-cooled microwave resonance window used for the electron cyclotron resonance (ECR) ion source is investigated in this paper. The microwave characteristic simulation, thermal analysis, and structure design are deeply and successively carried out before fabrication. After the machining and welding of the components, the window is cold and hot tested. The application results demonstrate that when the input power is 2000 W, the reflected power is only 5 W. The vacuum is below 10(-10) Pa, and the high power microwave operation can last 30 h continuously and reliably, which indicates that the design and assembling can achieve the high efficiency of the microwave transmission. Finally, the performance of the ECR ion source is enhanced by the improvement of the injected microwave power to the ECR plasma. Published by AIP Publishing.
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页数：5
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