A review of analysis methods for sub-micron indentation testing

被引：273
|
作者：
Fischer-Cripps, AC [1 ]
机构：
[1] CSIRO, Div Telecommun & Ind Phys, Lindfield, NSW 2070, Australia
来源：
VACUUM | 2000年 / 58卷 / 04期
关键词：
indentation testing; hardness; nanoindentation; thin film testing;
D O I：
10.1016/S0042-207X(00)00377-8
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The present work is concerned with the methods of analysis of data obtained from sub-micron indentation testing such as that performed on thin film systems. The underlying theory behind the extraction of elastic modulus and hardness from the unloading load-displacement data obtained with spherical indenter and Berkovich pyramidal indenters is given in some detail. A description of the corrections to the measured data is provided and limitations of the analysis highlighted. Crown Copyright (C) 2000 Published by Elsevier Science Ltd. All rights reserved.
引用
收藏
页码：569 / 585
页数：17
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